Sheet Plasma Excitation by a 2.45 GHz Microwave Power Introduced through a Local Gas Injection Type Dielectric Window

Abstract

A 2.45 GHz microwave power injected through a quartz glass window produced a stable sheet-shaped plasma with the 11 cm wide and 4 cm high rectangular cross section in a static linear magnetic field. A thin slot gas conduit opened near the surface of the window supplied a discharge gas forming a stream of neutral atoms that intersected perpendicularly the plasma flowing toward the window along the magnetic field. The gas stream caused the change of the luminous intensity distribution of the plasma around the microwave window indicating reduction of the local plasma heat load. The window did not show any damage for a continuous operation of plasma up to 2 kW microwave input power.

Effects of gas adsorbed on solid surface during gas breakdown in electron cyclotron resonance discharges

“…In presence of confinement magnetic field, the contribution of δ-SE to ionization is expected to be even higher. In reported studies on ECR breakdown, however, the ignition has been considered to be governed by volume processes [15][16][17][18][19][20][21][22][23][24][25][26][27], while surface processes have been excluded.…”