“…Besides the already mentioned Raman spectroscopy [ 5 , 6 , 7 , 9 , 10 , 11 , 12 ], further PAT tools were developed to monitor the coating thickness during the coating process. To be mentioned are near infrared spectroscopy [ 13 , 14 , 15 , 16 , 17 , 18 ], terahertz-pulsed technology [ 10 , 19 , 20 , 21 , 22 , 23 , 24 ], optical coherence tomography [ 22 , 25 , 26 , 27 ] and visual imaging techniques [ 1 , 28 , 29 , 30 ]. Most of these process analyzers generate large volumes of multidimensional data.…”