Shear thickening of chemical mechanical polishing slurries under high shear

Crawford, Nathan C.; Williams, S. Kim Ratanathanawongs; Boldridge, David; Liberatore, Matthew W.

doi:10.1007/s00397-012-0636-8

Cited by 35 publications

(20 citation statements)

References 40 publications

(59 reference statements)

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“…In recent years, the STFP method has been studied and applied in the polishing process of complicated products [24][25][26][27][28] . This machining method has been used in various industrial fields including human body armor 29 , smart structures, shock absorbing devices 30 , and fine polishing 31,32 . This indicates that the STFP offers high advantageous and efficiency in the manufacturing process.…”

Section: Modeling Of Stfp Process Stfp Processmentioning

confidence: 99%

Simulation study on polishing of gear surfaces in non-Newtonian fluid

Nguyen

Lý

Duong

2020

Sci. Tech. Dev. J.- Eng. Tech.

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The non-Newtonian fluid is one type of shear thickening fluid which applied to process the complicated products. In this study, the new method of shear thickening fluid polishing (STFP) was used to polish the alloy steel SCM435 gears and the principle and performance of polishing process were also introduced. In the polishing process, the inclination angle of gears was believed to be an important parameter that affects the pressure and surface quality at different position on the tooth surfaces because it determines the contact between the polishing fluid and the tooth surface of the gear. The influence of the inclination angles on the pressure distribution and characteristics of fluid flow was performed by simulation process. The inclination angles of 0, 4, 8, 12, 16, 20 and 24 degrees were chosen in this study. As a result, the best inclination angle of gears is about 16 degree in the machining process. The tooth surfaces of gear have been in contact with the polishing fluid and the produced pressure reaches of 14.88 kPa. In addition, the influence of polishing speed on pressure were carried out in this study when inclination angle was established about 16 degree. The produced pressure on tooth surfaces increased with increasing the polishing speed. The results indicated that the different polishing speed also greatly affects the surface quality and machining efficiency. Therefore, the suggested machining method can become a suitable processing method for polishing the complicated products.

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Section: Modeling Of Stfp Process Stfp Processmentioning

confidence: 99%

Simulation study on polishing of gear surfaces in non-Newtonian fluid

Nguyen

Lý

Duong

2020

Sci. Tech. Dev. J.- Eng. Tech.

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“…A number of recent studies have used the above mentioned adaptations and gap error corrections of parallel-plate setups with micrometer gap separations with a focus on studying fluids a high shear rates [23,24,46,60,75], and on confinement effects [23,24,46,89,95]. In addition, these setups have been used to study small sample volumes [60], and to mimic usage or processing environment conditions [23,46,89].…”

Section: Adaptations To a Conventional Rotational Rheometermentioning

confidence: 99%

“…Figure 1 gives an example of a flow curve obtained from a sample volume of only 0.3 nL. Furthermore, decreasing the length scale over which a sample is probed allows to attain high shear rates [16] that are encountered in many industrial processes (e.g.γ ≥ 10 6 s −1 as reported in [23]).…”

Section: Introductionmentioning

confidence: 99%

The dark side of microrheology: Non-optical techniques

Vleminckx

Clasen

2014

Current Opinion in Colloid & Interface Science

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Microrheology probes the mesoscale between bulk rheology, which provides an integral sample response, and nanorheology, which refers to a local response at a molecular confinement level. The term 'microrheology' is often used to refer to optical particle tracking methods that measure a local response of a sample. In contrast to this, non-optical microrheology techniques generally allow two different effects to be studied: actual confinement effects on the rheology and boundary effects such as slip. Investigating the mesoscale range has additional advantages such as the possibility to perform measurements with small sample volumes and at high shear rates. This review bundles the wide array of non-optical techniques into five categories: adaptations to a conventional rotational rheometer, sliding plate rheometry on a micrometer scale, microfluidics, piezo vibrators and radial channel flows. The concept of each set of techniques is described, together with their operational window and examples of recent studies.

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“…While regular gap settings on the order of a millimeter are most of the time sufficient, lower gap separations can be desirable. This might be the case if only small sample volumes are available [2][3][4][5][6][7][8], when slip needs to be determined via a Mooney analysis (since measurements at small gap settings lead to a higher resolution for the determination of slip velocities) [9][10][11][12][13][14], for measurements at higher rates for a given (maximum) velocity difference of the shearing plates [15][16][17][18][19][20], or if confinement effects should be introduced and measured [21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

On the inseparability of slip and gap-error

Vleminckx

Clasen

2016

Journal of Rheology

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In this paper we demonstrate that it is principally not possible to separate a misalignment or gap error from an apparent slip length when employing a varying measuring gap analysis as the Kramer method or the Mooney analysis. Such error sources become important when utilizing parallel plates in rotational rheometry at low gap separation as for the determination of slip, for low sample volume availability, or for the study of confinement effects. While rheologists are generally aware that gap settings on the order of O(0.1 mm) and below can be affected by gap errors or non-parallelism, this is seldom discussed together with (or in comparison to) other error sources as slip, instabilities, compressibility, or normal stresses. However, other error sources such as slip lengths can easily be of the same order as the generally reported misalignment error of O(0.01 mm). We demonstrate with an experimental example that both error sources can be of similar order of magnitude, and can principally not be separated with a gap variation analysis. This should again raise awareness that discussions of only slip velocities (or only gap error effects) should thus be taken with care if obtained from a gap variation analysis, if the other effect cannot be ruled out or is not separately determined with an independent measurement technique.

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Shear thickening of chemical mechanical polishing slurries under high shear

Cited by 35 publications

References 40 publications

Simulation study on polishing of gear surfaces in non-Newtonian fluid

Simulation study on polishing of gear surfaces in non-Newtonian fluid

The dark side of microrheology: Non-optical techniques

On the inseparability of slip and gap-error

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