Shear strength of room-temperature-bonded sapphire and metal substrates using Au films

Kon, Hitoe; Uomoto, Miyuki; Nakajima, Nobuya; Nakaya, Takayuki; Shimatsu, T.

doi:10.23919/ltb-3d.2017.7947444

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) 2017

DOI: 10.23919/ltb-3d.2017.7947444

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Shear strength of room-temperature-bonded sapphire and metal substrates using Au films

Hitoe Kon¹,

Miyuki Uomoto

Nobuya Nakajima³

et al.

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Shear strength of room-temperature-bonded sapphire and metal substrates using Au films

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References 3 publications

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