2018
DOI: 10.3390/mi9100501
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Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters

Abstract: Measurement of hemostatic parameters is essential for patients receiving long-term oral anticoagulant agents. In this paper, we present a shear mode bulk acoustic resonator based on an inclined c-axis aluminum nitride (AlN) film for monitoring the human hemostatic parameters. During the blood coagulation process, the resonant frequency of the device decreases along with a step-ladder profile due to the viscosity change during the formation of fibers in blood, revealing the sequential coagulation stages. Two he… Show more

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Cited by 6 publications
(7 citation statements)
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“…Tus, the surface chemical reaction would lead to the density change of the AlN flm, resulting in the resonance frequency increase [18]. Te reaction between acetone and the adsorbed oxygen is shown as follows [19]:…”
Section: Experiments and Sensor Signalmentioning
confidence: 99%
“…Tus, the surface chemical reaction would lead to the density change of the AlN flm, resulting in the resonance frequency increase [18]. Te reaction between acetone and the adsorbed oxygen is shown as follows [19]:…”
Section: Experiments and Sensor Signalmentioning
confidence: 99%
“…9. AlN is a low loss piezoelectric material with simple deposition process and very close acoustic velocity to polysilicon [43,44]. Fig.…”
Section: Bandwidth Tuning Through Piezoelectric Couplingmentioning
confidence: 99%
“…To maintain operation in liquid, acoustic wave resonators for biosensing are usually designed to operate in shear modes. When the movement of the shear wave is parallel to the liquid-solid interface, the mechanical motion transferred to the liquid is reduced compared to vertically polarized waves [16][17][18] . The acoustic radiation, however, cannot be eliminated, as the horizontal friction between the solid and water particles still conveys energy.…”
Section: Introductionmentioning
confidence: 99%
“…As the movement of the shear wave is in parallel with the liquid-solid interface, the mechanical motion transferred to liquid is reduced compared to vertically polarized waves. [16][17][18] The acoustic radiation, however, cannot be eliminated as the horizontal friction between the solid and water particles still conveys energy. The complete suppression of the acoustic radiation can only be achieved by completely preventing wave propagation in the liquid.…”
Section: Introductionmentioning
confidence: 99%