Shape memory NiTi thin films deposited at low temperature

Isalgué, A.; Torra, V.; Seguin, Jean-Luc; Bendahan, Marc; Amigó, José M.; Esteve-Cano, Vicente

doi:10.1016/s0921-5093(99)00403-7

Cited by 16 publications

(6 citation statements)

References 10 publications

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“…For graphs 8 and 11, the hysteresis is as large as 75 °C, while for graph 9, the hysteresis is approximately 15 °C. We deposited NiTi onto a layer of Pt for samples [13][14][15][16]. We did this so the stress versus temperature data were representative of the NiTi cantilevers on Pt.…”

Section: Stress Vs Temperature Measurements For Niti On Si and Si/ptmentioning

confidence: 99%

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

Srour¹,

Knick²,

Morris³

2015

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Section: Stress Vs Temperature Measurements For Niti On Si and Si/ptmentioning

confidence: 99%

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

Srour¹,

Knick²,

Morris³

2015

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“…Ishida [30][31][32][33] , et al have developed a SMA NiTi bimorph and investigated its suitability as micro flapper. Kotnur [34][35] , et al have studied the influence of various parameters on NiTi SMA bimorph. Copper based shape memory alloys exhibits a low hysteresis along with interesting electrical and thermal properties.…”

Section: Introductionmentioning

confidence: 99%

Thermo mechanical and Control Behaviour of Copper based Shape Memory Alloy Bimorph Actuator towards the Development of Micro Positioning System

Muralidharan

Jayachandran

Yogeshwaran³

et al. 2020

Def. Sc. J.

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A shape memory alloy (SMA) bimorph actuator is a composite structure composed of flexible polyimide substrate and SMA thin film deposited using thermal evaporation technique. In this work, the substrate thickness in the range of 25 - 75 mm was selected for the development of CuAlNiMn SMA bimorph actuator. An investigation on the control behavior of copper based SMA bimorph towards the development of micro positioning system has been performed. The actuation behavior of the SMA bimorph was studied using electrical actuation. Subsequently, a proportional integral derivative (PID) controller was designed to control the bimorph actuator with proper tuning of gain parameters. The displacement of the bimorph actuator was controlled through dedicated experimental setup consisted of laser displacement sensor, data acquisition system and LabVIEW software. The CuAlNiMn SMA bimorph actuator resulted in a satisfying control performance which can be extended to MEMS applications. A preliminary prototype of the SMA bimorph actuator based micro positioning system has been developed.

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“…It was shown that electrical resistivity measurements are more sensitive for detection of the R-phase in comparison with DSC [14]. Titanium deficiency in the final material can often be a problem, but it can be corrected by co-sputtering with a pure titanium target [13,[15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Properties of NiTi Shape Memory Alloy Micro-Foils Obtained by Pulsed-Current Sintering of Ni/Ti Foils

Prendota

Goc

Strączek

et al. 2019

Metals

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Successful one-step manufacturing of micro-foils of NiTi shape memory compound by pulsed-current sintering of nickel and titanium is reported. Sandwich-like starting configurations of Ni/Ti/Ni (ST1, ST4), Ti/Ni/Ti (ST3), and a simple Ni/Ti (ST2) one, were used. XRD and differential scanning calorimetry (DSC) measurements revealed multistep martensitic transformation, much more pronounced for ST1 than for ST2 and ST3. SEM/energy dispersive X-ray spectrometer (EDS) measurements showed the predominant NiTi phase in ST1, ST4, and other intermetallic compounds in addition to it, for ST2 and ST3. The temperature dependence of the electrical resistance for ST4 shows a peak corresponding to the R-phase and a high residual resistivity. The shape memory effect of 100% was obtained for ST1 and ST4, with the temperature range of its recovery dependent on the initial strain. The ST2 and ST3 materials revealed brittleness and a lack of plasticity due to the dominancy of the austenite phase and/or the intermetallic compound content.

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Shape memory NiTi thin films deposited at low temperature

Cited by 16 publications

References 10 publications

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

Thermo mechanical and Control Behaviour of Copper based Shape Memory Alloy Bimorph Actuator towards the Development of Micro Positioning System

Properties of NiTi Shape Memory Alloy Micro-Foils Obtained by Pulsed-Current Sintering of Ni/Ti Foils

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