Flash memory using a dual phase TiO x N y /TiN charge trapping layer has been fabricated and its electrical properties were investigated. The TiO x N y /TiN layer was formed by partial oxidation of a pre-deposited TiN layer, and the formation of TiO x N y /SiO x N y was confirmed by high-resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) analyses. The enlarged conduction ( c = 3 6 eV) and valence ( v = 2 5 eV) band offsets of the TiO x N y /TiN to SiO 2 enabled low-voltage (±6 V) and fast programming/erasing (P: 2.7×10 4 V/s and E: −5.1×10 4 V/s) operations, while the transition layer suppressed the trapped charge leakage, giving rise to good 10-year data retention with less than 35% V th decay.