Shape Memory Alloy Actuators for Silicon Microgrippers

Garcés-Schröder, Mayra; Zimmermann, Tom; Siemers, Carsten; Leester-Schädel, Monika; Böl, Markus

doi:10.1109/jmems.2019.2936288

Cited by 17 publications

(5 citation statements)

References 41 publications

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“…TiNi alloys are popular as a representative shape memory alloy to show shape memory effect and superelastic effect at ambient temperature. Since the TiNi alloys possess superior characteristics as actuators, such as high power output per unit volume, the applications of TiNi films have been proposed to date in the MEMS community [123][124][125][126][127][128]. The use of TiNi films as MEMS actuators is reasonable because the weak point of TiNi alloys is known as a low response.…”

Section: Metalsmentioning

confidence: 99%

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Namazu

2022

IEEJ Transactions Elec Engng

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By virtue of a great progress of semiconductor fabrication technologies, micro electro‐mechanical systems (MEMS) have been developed for a wide variety of industries. For reliability of MEMS, micromaterials in MEMS need to be examined experimentally, and the obtained results need to be reflected in the design of MEMS. In addition, with the benefit of such the MEMS technology, nowadays mechanical characteristics of nanomaterials have been evaluated precisely. Nanoscale mechanical testing provides an opportunity to find new unique physical phenomena, such as plastic deformation in Si at intermediate temperatures. In this review paper, mechanical testing technologies developed for investigating micro and nanoscale materials are reviewed. Then, mechanical characteristics of Si and other materials evaluated using the micro and nano mechanical testing technologies are introduced. © 2022 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.

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Section: Metalsmentioning

confidence: 99%

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Namazu

2022

IEEJ Transactions Elec Engng

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“…Many of the existing micro actuators have been driven mainly by electric heating elements [1], electrostatic plates [2], electromagnetic elements [3], piezoelectric components [4] and shape memory [5]. A direct-coupled optical switch [6] based on an electrothermaldriven cantilever was designed to have output displacement of 130 µm with a driven voltage of 44 V. As the temperature effect cannot be ignored, Dai et al [7] coupled a massspring system with the actuator, while the method caused a size increase.…”

Section: Introductionmentioning

confidence: 99%

Design and Control of a Trapezoidal Piezoelectric Bimorph Actuator for Optical Fiber Alignment

Wang,

Li,

2023

Materials

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To align a pair of optical fibers, it is required that the micro actuators used be small and have the characteristics of high accuracy and fast response time. A trapezoidal piezoelectric bimorph actuator was proposed for pushing and pulling an optical fiber. Based on a mathematical model and finite element model established in this paper, we analyzed the output displacement and output force of the proposed trapezoidal piezoelectric actuator under the influence of structural parameters. Since the piezoelectric bimorph actuator had a hysteresis effect, we applied particle swarm optimization to establish a Prandtl–Ishlinskii (PI) model for actuator and parameter identification. Then, two control methods, namely feedforward control considering hysteresis effects and fuzzy proportional-integral-derivative (PID) control employing feedback, were proposed. Finally, a composite control model combining the two control methods with fewer tracking errors was designed. The results show that the output displacement of this actuator is larger than that of a rectangular one. Additionally, the fuzzy PID control has a lower response time (15 ms) and an overshoot (5%).

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“…Although numerous studies exist on laser welding of Ni-Ti alloys as for example summarized in References 23, 25, the studies on welding thin foils among them are rather limited, as of interest for example for reconfigurable systems such as mobile phone antennas or temperature-sensitive actuators. [27,28] Chan et al [29] investigated the welding of foils with a thickness of 250 lm made from a Ni-Ti alloy with 55.91 wt pct of Ti using a continuous wave fiber laser with a nominal power of 100 W, obtaining welds that were mainly of cellular dendrites and with a small amount of Ni 3 Ti as a brittle intermetallic phase. Also, it was found that the onset of austenite and martensite start temperatures, A s and M s , of the Ni-Ti welds shifted to lower values as compared to the as-received Ni-Ti alloy.…”

Section: Introductionmentioning

confidence: 99%

Laser Welding of Nitinol Thin Foils: Mechanical Properties and Microstructure Depending on Process Parameters

Katrakova-Krüger

Pegoraro

Salmaso

et al. 2023

Metall Mater Trans A

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Ni–Ti alloys are used as functional materials in numerous sectors such as aerospace, automotive engineering, medical technology, and consumer goods. Their properties in terms of shape memory effect and superelasticity offer a great potential for innovative smart products. However, forming and machining of these alloys into concrete products is challenging. Assembling plain structures by laser welding to complex product shapes offers an economical alternative in many cases, but can be associated with negative effects, such as reduction of strength, development of brittle intermetallic compounds, alteration of transformation temperatures, and modification of shape memory effects and superelastic behavior. Against this background, investigations on laser welding of Ni55/Ti45 foil with a thickness of 125 µm by a fiber laser were conducted. Supported by methods of design of experiments, optimal parameters were determined with respect to laser power, welding speed, focus position, and beam oscillation, and the welding results were analyzed concerning the microstructure and mechanical characteristics of the welded joints. The effect of laser beam oscillation was investigated for the first time for the welding of this alloy. Due to the very low thickness, the preparation of the foils for the microstructure characterization is quite demanding. Best results were obtained by ion milling. Fracture surfaces and the influence of the welding were also investigated.

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Shape Memory Alloy Actuators for Silicon Microgrippers

Cited by 17 publications

References 41 publications

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Design and Control of a Trapezoidal Piezoelectric Bimorph Actuator for Optical Fiber Alignment

Laser Welding of Nitinol Thin Foils: Mechanical Properties and Microstructure Depending on Process Parameters

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