Shape controllable micro-nozzle fabrication

Abstract

A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micronozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 lm and the base diameter varying from 167.2 to 360 lm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm 2 utilizing multiple backside exposures through designed circular aperture and zone plate masks.

Fabrication of Microglass Nozzle for Microdroplet Jetting

“…The diameter size, the flow channel geometry, and fluid impedance are the key factors affecting the ejection capacity [1][2][3][4][5][6][7][8]. Each application requires an optimal shape and size for micronozzles; hence a controllable fabrication process is extremely desirable [9][10][11][12][13]. Currently, micronozzles have been made by several methods including micromechanical drilling, laser drilling, electroforming over a sacrificial post, electron beam machining, electrodischarge machining, lithography and etching, deep reactive ion etching (DRIE), LIGA process, and bulk-silicon etching [14].…”