SF<sub>6</sub>decomposition and layer formation due to excimer laser photoablation of SiO<sub>2</sub>surface at gas–solid system

Sajad, Batool; Parvin, Parviz; Bassam, Mohamad Amin

doi:10.1088/0022-3727/37/24/008

Cited by 17 publications

(15 citation statements)

References 18 publications

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“…N and ω are the number of shots and the dissociation rate per pulse, respectively. 58,59 Equation 6 is basically used for MPD analysis, and the decomposition data were fitted to the experimental curve. Here, the decomposition of methane molecules in terms of successive laser shots is modeled in virtue of the exponential equations.…”

Section: Resultsmentioning

confidence: 99%

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

et al. 2014

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Methane decomposition has been extensively investigated using a Q-switched Nd:YAG laser, focused on the metal catalysts including Ni, Fe, Pd, and Cu within the controlled chamber to verify the effect of catalyst, plasma properties, and yield and selectivity of the products. Fourier transform IR spectroscopy (FTIR) and gas chromatography (GC) are employed to support the characterization of the components. This indicates that methane is strongly decomposed within the metal-assisted laser-induced plasma, leading to the subsequent recombination and the production of heavier hydrocarbons. The dominant species, including propane, ethane, and ethylene, have been identified examining different metallic catalysts. The dissociation rate, conversion ratio, selectivity, and yield of products are strongly dependent on the metal target and plasma characteristics.

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Section: Resultsmentioning

confidence: 99%

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

et al. 2014

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“…Here, we describe a plasma fluorination method based on a specific plasma generation process. Contrary to other direct plasma creation procedures usually based on microwave discharge, we employ molecular decomposition of SF 6 by irradiation of a silicon-based target [15,20,21]. Using a pulsed laser beam of a Nd:YAG laser focused on a silicon target, SF 6 gas was decomposed and graphene placed near the plume was fluorinated.…”

Section: Introductionmentioning

confidence: 99%

Laser-ablation-assisted SF6 decomposition for extensive and controlled fluorination of graphene

Plšek

Drogowska

Fridrichová

et al. 2019

Carbon

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We present a safe, clean, convenient, and easy-to-control method for extensive fluorination of graphene using laser-ablation-assisted decomposition of gaseous SF 6 molecules. The decomposition process is based on irradiation of a silicon target using a Nd:YAG laser (532 nm) in an SF 6 atmosphere. The reactive species produced in the plume above the silicon target are consequently responsible for fluorination of graphene placed in proximity to the plume.The applicability of the proposed method is demonstrated on fluorination of CVD-grown graphene on copper foil. Samples with different fluorination levels were evaluated using Xray photoelectron spectroscopy and Raman spectroscopy. The influence of the applied number of laser pulses on the nature of the C-F bonds, fluorine, and sulphur concentrations, as well as graphene damage, is discussed. The method enables control of fluorine content by simple counting of laser pulses. We show that a fluorination level corresponding to a stoichiometry up to CF1.4 can be achieved. The fluorination does not lead to the formation of Cu-F in contrast to previously published approaches.

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“…Pulsed laser irradiation on the SiO 2 surface in an SF 6 atmosphere induces gas decomposition [2]. It produces reactive species to restructure the glass surface too.…”

Section: Introductionmentioning

confidence: 99%

“…It produces reactive species to restructure the glass surface too. The irradiations on amorphous SiO 2 glass were performed at different wavelengths [1][2][3]. During Nd:YAG laser irradiation, the possibility for energy absorption by free electrons via the inverse Bremsstrahlung (IB) process leads to increase in the electron-molecule collision rate and the generation of weak plasma.…”

Section: Introductionmentioning

confidence: 99%

Glass surface modification using Nd:YAG laser in SF6 atmospheres

Dehghanpour

Parvin

2015

J Theor Appl Phys

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Glass surface modification is one of the processes which changes its physical properties. Changing optical property is a significant effect of surface modification. Among the surface modification methods, laser surface modification is attractive for researchers. Here, SiO 2 glass target was irradiated by Q-switched Nd:YAG laser (1064 nm) in SF 6 atmospheres as well as vacuum. In this process, an Nd:YAG laser beam was focused near the glass target while the target was inserted in a chamber containing SF 6 atmosphere or at vacuum condition. The surface morphology changes were investigated by scanning electron microscopy (SEM). Noticeable surface changes were observed due to laser irradiation in SF 6 atmosphere. Although the absorption lines of SF 6 molecule are not near the Nd:YAG laser wavelength, laser-induced breakdown spectroscopy (LIBS) showed decomposition of SF 6 molecules near a glass target. The ablated fragments from the target impacted on gas molecules and decomposed them. In this work, LIBS showed that there were several fluorine ions when the target was irradiated in an SF 6 atmosphere. This demonstrates SF 6 molecule decomposition near the glass target by laser irradiation. The plasma temperature was *2000 K. This temperature is much less than metallic or other gaseous materials' plasma temperatures.

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SF₆decomposition and layer formation due to excimer laser photoablation of SiO₂surface at gas–solid system

Cited by 17 publications

References 18 publications

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

Laser-ablation-assisted SF6 decomposition for extensive and controlled fluorination of graphene

Glass surface modification using Nd:YAG laser in SF6 atmospheres

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SF6decomposition and layer formation due to excimer laser photoablation of SiO2surface at gas–solid system

Cited by 17 publications

References 18 publications

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

Laser-ablation-assisted SF6 decomposition for extensive and controlled fluorination of graphene

Glass surface modification using Nd:YAG laser in SF6 atmospheres

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Product

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SF₆decomposition and layer formation due to excimer laser photoablation of SiO₂surface at gas–solid system