The potential impact of SF 6 as a potent greenhouse gas on the global climate is highly attractive. This paper studies the effect of H 2 O concentration, SF 6 inlet concentration and pre-heating temperature on SF 6 abatement in a packed bed plasma reactor in terms of the removal efficiency and products selectivity. The results showed that the best performance in SF 6 abatement was obtained at 1% H 2 O and 100 °C with 98.7% destruction and remove efficiency (DRE) at 2% SF 6 . Higher energy yields was obtained under higher SF 6 inlet concentration. Moreover, the existence of water vapor weakened the micro-discharge and provided H and OH radicals for this system, which showed a close relationship to removal efficiency and products selectivity. Among four sulfur-containing products, SO 2 F 2 was more stable than SOF 2 , SOF 4 and SO 2 . Meanwhile, SOF 4 and SO 2 were very susceptible to the above parameters. This article provides a better understanding of SF 6 abatement in a view of both scientific and engineering.