Sezawa SAW devices: Review of numerical-experimental studies and recent applications

Hadj-Larbi, Fayçal; Serhane, Rafik

doi:10.1016/j.sna.2019.03.037

Cited by 36 publications

(26 citation statements)

References 150 publications

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“…It is quite clear that the displacements along the y direction ( u y ) of the two modes are close to zero, while their longitudinal ( u z ) and vertical shear components ( u x ) are dominant. The first mode and second mode correspond to the Rayleigh mode and Sezawa mode, respectively, checked and analyzed by the displacement field distributions. − …”

Section: Resultsmentioning

confidence: 99%

“…As previous studies pointed out, when the Sezawa wave velocity reaches to the bulk shear wave velocity (V T ) of the substrates (V T is near 7000 m/s for Al 2 O 3 ), the Sezawa wave converts into high-velocity pseudo-SAWs and starts to leak energy to the substrate, which is the cutoff point of the Sezawa wave mode. 16,31,35 It is observed that the V p of the Rayleigh mode will be reduced below 3000 m/s when h ZnO /λ is more than 0.5. In addition, K 2 for the Rayleigh mode is relatively larger than that for the Sezawa mode and changes parabolically with h ZnO /λ.…”

Section: ■ Introductionmentioning

confidence: 90%

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Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

Shen

et al. 2020

ACS Appl. Mater. Interfaces

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With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/SiO2/Al2O3 SAW devices with embedded electrodes was developed, and with the help of the finite element method (FEM), the propagation characteristics were simulated. Through adopting embedded electrodes, a large electromechanical coupling coefficient (K 2) of 6.6% for the Rayleigh mode can be achieved (5 times larger than that of the conventional ZnO/Al2O3 structure), feasible for wideband SAW devices, and a low acoustic velocity (V p) of 2960 m/s is exhibited simultaneously, which benefits the miniaturization of SAW devices. The dramatic enhancement of K 2 is mainly attributed to the more efficient excitation of SAW in piezoelectric films. Furthermore, a SiO2 overlay is added on the top of the structure to gain an excellent zero temperature coefficient of frequency (TCF). Experimentally, we successfully fabricated SAW one-port resonators based on the proposed structure and good characteristics of high K 2, low V p, and small TCF as simulated were confirmed. Our results show that the proposed structure provides a viable route to design SAW devices with a large bandwidth, small size, and robust temperature compensation for practical use.

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Section: Resultsmentioning

confidence: 99%

Section: ■ Introductionmentioning

confidence: 90%

Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

Shen

et al. 2020

ACS Appl. Mater. Interfaces

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show abstract

“…Love mode sensors can be used for gas and liquid detection. There are other types of SAW propagation mode that have been widely examined in literature, including Sezawa mode, [62][63][64] surface skimming bulk wave, [65,66] and surface transverse wave. [67][68][69] However, these will not be investigated in this review due to the fact that SH-SAW devices with guiding layer or Love mode devices between the IDTs region are the most commonly used platform for biosensing applications in liquids due to their wave guiding layer that can confine acoustic waves energy at the piezoelectric surface.…”

Section: Saw Devices and Mode Propagationmentioning

confidence: 99%

Current Trends on Surface Acoustic Wave Biosensors

Zida

Lin

Khung

2021

Adv Materials Technologies

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The development of rapid biosensing platforms is an integral part for the detection of many diseases, as well as important clinical biomarkers. So far, many new biosensing technologies have been described in literature but many of these novel platforms remain noncommercializable due to challenges in fabrication process, operational conditions as well as other cost concerns. Hence, there is a need to develop efficient and cost‐effective biosensing platforms and of the types available from literature, surface acoustic wave (SAW) biosensors have certain standout attributes. The simple manufacturing requirements of SAW‐based biosensor and its wide operating frequency range have produced promising outcome for bio‐detection and this has rendered this technological platform as a serious contender for point‐of‐care biosensor design. So far, SAW devices are reported for the detection of various bioactive targets of clinical importance and several designs are already commercialized. In this review, the latest development of SAW technologies in recent years for the detection of a broad range of biomolecules is presented and some of the challenges as well as potential future developments of SAW biosensors are highlighted.

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“…SAW resonators manufactured on GaN/Si and AlN/Si layered structures with resonance frequencies above 5 GHz, and high sensitivity sensors based on them have been reported in the last years [11], [12], [13]. ScAlN is a novel material and a great candidate for acoustic devices fabrication, due to its excellent piezoelectric properties: high phase velocity, high coupling coefficient, k 2 eff, high Q-factor, high values of piezoelectric constants, surpassing the reported values for other group III-nitrides [14], [15].…”

Section: Introductionmentioning

confidence: 99%

A GHz operating ScAlN based SAW resonator used for Surface Acoustic Waves/Spin Waves Coupling

Zdru¹,

Nastase²,

Hess³

et al. 2022

Preprint

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A thin ScAlN layer was deposited on high resistivity (111) oriented silicon and two port surface acoustic wave (SAW) devices were manufactured, using advanced nanolithographic techniques, on this material. The Surface Acoustic Wave and Spin Wave (SAW/SW) coupling was performed via a thin ferromagnetic layer (Ni) placed between the interdigitated transducers (IDTs) of the SAW device. Since the phase velocity in this material is lower than in the Si substrate, both Rayleigh (4.67 GHz) and Sezawa (8.05 GHz) propagation modes could be observed. The amplitude of the S21 parameter around the two resonances was measured for values of the magnetic field µ0H from -280 to +280 mT, at different angles (θ) between the SAW propagation direction and the magnetic field direction. A maximum decrease of 2.54 dB occurred in S21 for the Rayleigh mode at µ0H = -90 mT, and of 7.24 dB for the Sezawa mode at µ0H =-203 mT, both at θ = 45°. These values were extracted from time gated processing of the frequency domain raw data.

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Sezawa SAW devices: Review of numerical-experimental studies and recent applications

Cited by 36 publications

References 150 publications

Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

Current Trends on Surface Acoustic Wave Biosensors

A GHz operating ScAlN based SAW resonator used for Surface Acoustic Waves/Spin Waves Coupling

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Sezawa SAW devices: Review of numerical-experimental studies and recent applications

Cited by 36 publications

References 150 publications

Enhanced Performance of ZnO/SiO2/Al2O3 Surface Acoustic Wave Devices with Embedded Electrodes

Enhanced Performance of ZnO/SiO2/Al2O3 Surface Acoustic Wave Devices with Embedded Electrodes

Current Trends on Surface Acoustic Wave Biosensors

A GHz operating ScAlN based SAW resonator used for Surface Acoustic Waves/Spin Waves Coupling

Contact Info

Product

Resources

About

Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes

Enhanced Performance of ZnO/SiO₂/Al₂O₃ Surface Acoustic Wave Devices with Embedded Electrodes