1994
DOI: 10.1117/12.167154
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Separation of the influence of in-plane displacement in multiaperture speckle shear interferometry

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Cited by 30 publications
(2 citation statements)
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“…Surface topography measurements are essential for many engineering applications, especially for testing and calibration of components [1,2]. Optical imaging techniques such as interferometry and confocal microscopy are the most commonly used methods due to their non-contact and non-destructive capabilities [3][4][5][6]. Interferometric microscopes analyze the interference fringes formed by coherent illumination to track the peaks and valleys of the surface texture and produce digitized topography profiles and images.…”
Section: Introductionmentioning
confidence: 99%
“…Surface topography measurements are essential for many engineering applications, especially for testing and calibration of components [1,2]. Optical imaging techniques such as interferometry and confocal microscopy are the most commonly used methods due to their non-contact and non-destructive capabilities [3][4][5][6]. Interferometric microscopes analyze the interference fringes formed by coherent illumination to track the peaks and valleys of the surface texture and produce digitized topography profiles and images.…”
Section: Introductionmentioning
confidence: 99%
“…Speckle pattern is chaotic and contain the very important information about the object or surface from which it is generated 2 . On this basis, speckle patterns are exploited in different measurements such as Surface deformation, position, roughness, displacement, the shape of objects (Imaging), vibration and flow measurements in metrology, medicine, astronomy and defense applications 3 4 5 6 7 8 9 . Most of these techniques are based on the particulate nature of speckle (Size, intensity and distribution) and the collective wave phenomena of speckle patterns (Speckle pattern interference and diffraction) 10 11 .…”
mentioning
confidence: 99%