Sensor system for on-line monitoring of cell cultures

Moldovan, Carmen; Iosub, Rodica; Cornel, R; Moore, Eric; Paschero, A; Messina, Walter; Demarchi, Danilo; Codreanu, C.; Necula, Daniel; Codreanu, Nita; Dinescu, Adrian; Firtat, Bogdan

doi:10.1109/smicnd.2009.5336550

Cited by 1 publication

(3 citation statements)

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“…The microprobe fabrication steps are presented below and are represented in Figure 2:

Silicon wafers, n<100>, ρ = 3 Ωcm

Silicon oxidation, x ox = 1,6 μm [Figure 2(a)]

Resist Spin coating t resist = 4 μm

Photoresist patterning (UV, E = 100 mJ/cm 2 , t dev = 30 s), Mask 1 [Figure 2(a)]

Ti/Pt 15 nm/200 nm deposition [Figure 2(b)]

Photoresist removal [Figure 2(c)]

Si 3 N 4 deposition and patterning for opening contact windows between cells and electrodes and the opening the interchip for allowing the silicon anisotropic etching from the front size. Mask 2 [Figure 2(c)]

Backside oxide patterning and anisotropic etching for microprobe release and thinning [11,12], t etching = 400 min, T = 80 °C in TMAH, Mask 3 [Figure 2(c)]…”

Section: Methodsmentioning

confidence: 99%

“…Backside oxide patterning and anisotropic etching for microprobe release and thinning [ 11 , 12 ], t etching = 400 min, T = 80 °C in TMAH, Mask 3 [ Figure 2(c) ]…”

Section: Methodsmentioning

confidence: 99%

“…The working electrode is formed by Ti/Pt with conductive polyaniline on it. The electrochemically deposited polyaniline has an intrinsic nanofibre structure of 100 nm diameter, as we can see in Figure 5(a) [ 12 ].…”

Section: Methodsmentioning

confidence: 99%

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Miniaturized Integrated Platform for Electrical and Optical Monitoring of Cell Cultures

Moldovan

Iosub

Codreanu

et al. 2012

Sensors

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The following paper describes the design and functions of a miniaturized integrated platform for optical and electrical monitoring of cell cultures and the necessary steps in the fabrication and testing of a silicon microchip Micro ElectroMechanical Systems (MEMS)-based technology for cell data recording, monitoring and stimulation. The silicon microchip consists of a MEMS machined device containing a shank of 240 μm width, 3 mm long and 50 μm thick and an enlarged area of 5 mm × 5 mm hosting the pads for electrical connections. Ten platinum electrodes and five sensors are placed on the shank and are connected with the external electronics through the pads. The sensors aim to monitor the pH, the temperature and the impedance of the cell culture. The electrodes are bidirectional and can be used both for electrical potential recording and stimulation of cells. The fabrication steps are presented, along with the electrical and optical characterization of the system. The target of the research is to develop a new and reconfigurable platform according to the particular applications needs, as a tool for the biologist, chemists and medical doctors working is the field of cell culture monitoring in terms of growth, maintenance conditions, reaction to electrical or chemical stimulation (drugs, toxicants, etc.). HaCaT (Immortalised Human Keratinocyte) cell culture has been used for demonstration purposes in order to provide information on the platform electrical and optical functions.

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“…The microprobe fabrication steps are presented below and are represented in Figure 2:

Silicon wafers, n<100>, ρ = 3 Ωcm

Silicon oxidation, x ox = 1,6 μm [Figure 2(a)]

Resist Spin coating t resist = 4 μm

Photoresist patterning (UV, E = 100 mJ/cm 2 , t dev = 30 s), Mask 1 [Figure 2(a)]

Ti/Pt 15 nm/200 nm deposition [Figure 2(b)]

Photoresist removal [Figure 2(c)]

Backside oxide patterning and anisotropic etching for microprobe release and thinning [11,12], t etching = 400 min, T = 80 °C in TMAH, Mask 3 [Figure 2(c)]…”

Section: Methodsmentioning

confidence: 99%

“…Backside oxide patterning and anisotropic etching for microprobe release and thinning [ 11 , 12 ], t etching = 400 min, T = 80 °C in TMAH, Mask 3 [ Figure 2(c) ]…”

Section: Methodsmentioning

confidence: 99%