Sensitivity enhancement of hydrogen-gas sensor by sub nm Au on Pd surface of a wireless quartz resonator
Akira Nagakubo,
Tokiya Matsukura,
Hirotsugu Ogi
Abstract:Hydrogen (H2) is an important source of next-generation energy production. The various H2 sensors developed to date cannot easily detect very low concentrations of H2 (<10 ppm) at room temperature within 100 s. In this study, we develop H2 sensors by depositing a 200-nm thick palladium (Pd) film on AT-cut quartz resonators and adding a sub-nm gold (Au) layer on the Pd surface. Moderate Au deposition on the Pd surface improves the sensitivity of the sensor by decreasing the activation energy of atomic-hydrog… Show more
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