Sensitivity Enhancement of CO2 Sensors at Room Temperature Based on the CZO Nanorod Architecture
Baktiyar Soltabayev,
Yessimzhan Raiymbekov,
Aidarbek Nuftolla
et al.
Abstract:Cobalt-doped ZnO (CZO) thin films were deposited on glass substrates at room temperature by radio frequency (RF) magnetron sputtering of a single target prepared with ZnO and Co 3 O 4 powders. Changes in the crystallinity, morphology, optical properties, and chemical composition of the CZO thin films were investigated at various sputtering powers of 45, 60, and 75 W. All samples presented a hexagonal wurtzite-type structure with a preferential c-axis at the (002) plane, along with a distinct change in the stra… Show more
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