Sensitivity Determination of CNT-Based ISFETs for Different High- Dielectric Materials

Dutta, Jiten Chandra; Thakur, Hiranya Ranjan

doi:10.1109/lsens.2017.2695648

Cited by 18 publications

(6 citation statements)

References 15 publications

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“…In contrast, the higher drift rate could be contributed to the higher capacitance value of hydrated layer. In Table 1 , the sensing performance of the YbTiO 4 membrane is compared with commonly used materials for EIS or ISFET-based sensors such as Ta 2 O 5 9 , Al 2 O 3 10 , ZrO 2 11 , HfO 2 11 , TiO 2 34 , SnO 2 35 , and Yb 2 Ti 2 O 7 22 . It is found that our YbTiO 4 membrane demonstrated a higher pH sensitivity (71.17 mV/pH), a smaller hysteresis voltage (<1 mV) and a lower drift rate (0.22 mV/h), relative to those of these materials.…”

Section: Resultsmentioning

confidence: 99%

Sensing and Impedance Characteristics of YbTaO4 Sensing Membranes

Pan

Huang

Her

2018

Sci Rep

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In this study we developed ytterbium tantalum oxide (YbTaO4) sensing membranes for use in electrolyte–insulator–semiconductor (EIS) pH sensors. The influence of rapid thermal annealing (RTA) treatment on the sensing and impedance properties of the YbTaO4 sensing membranes deposited through reactive co-sputtering onto Si substrates was explored. X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy revealed the structural, morphological, and chemical features, respectively, of these YbTaO4 films annealed at 700, 800 and 900 °C. The YbTaO4 EIS device annealed at the 800 °C exhibited a super-Nernstian response of 71.17 mV/pH within the pH range of 2–12. It also showed the lowest hysteresis voltage ( < 1 mV) and the lowest drift rate (0.22 mV/h) among the tested systems. Presumably, the optimal annealing temperature improved the stoichiometry of YbTaO4 film and increased its (−131)-oriented nanograin size. Moreover, the impedance properties of YbTaO4 EIS sensors were investigated by using the capacitance–voltage method. The resistance and capacitance of YbTaO4 sensing films annealed at three various temperatures were evaluated by using different frequency ranges in accumulation, depletion, and inversion regions. The semicircle diameter of the YbTaO4 EIS sensor became smaller, due to a gradual decrease in the bulk resistance of the EIS device, as the RTA temperature was increased.

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Section: Resultsmentioning

confidence: 99%

Sensing and Impedance Characteristics of YbTaO4 Sensing Membranes

Pan

Huang

Her

2018

Sci Rep

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“…Fabrication of the dual gate CNT-ENFET has started with indium tin oxide (ITO) coated glass plate (dimension: 6 mm × 3 mm ×1.1 mm) as a substrate which has also served as the bottom gate. On the top of the ITO, a layer of ZnO (κ~1.5) has been deposited (dimension:5 mm × 3 mm ×10 nm) using electrochemical deposition (ECD) technique [12]. On the top of this bottom insulating layer, a thin film of PEI doped multi-walled carbon nanotube (MWCNT) (> 8% carboxylic acid functionalized, avg.…”

Section: A Fabricationmentioning

confidence: 99%

High Performance CNTENFET with K/PPy/CNT nanocomposite biosensing layer for Cholesterol Detection

Keshwani¹,

Dutta²

2021

Preprint

Self Cite

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We have reported a high-performance dual gated carbon nanotube enzyme modified field-effect transistor (CNT-ENFET) for cholesterol detection. To improve the device performance, we have used dual-gate design with high κ dielectric as top gate and low κ dielectric as bottom gate and a nanocomposite of potassium doped carbon nanotube with polypyrrole (K/PPy/CNT) as the biosensing membrane. The device exhibited a good sensitivity (~1.0 V/decade), low response time (~1 s), wide dynamic range (0.1 - 25) mM, wide linear range (2-20 mM), low detection limit (0.11 mM), good stability (7 months) and high selectivity (interference ~1.8 %).

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“…Metal Al has been used to form the source (S) and drain (D) contact regions on the top of the CNT layer. The details of fabrication process of these layers and contacts can be obtained in our earlier publications [12], [13]. Referring to the nanocomposite K/PPy/CNT layer, a solution has been first prepared by adding two ml of (1.0 M) KOH solution (potassium cannot be directly doped as it is unstable in air and very reactive with water) to 10 ml of CNT solution.…”

Section: A Fabricationmentioning

confidence: 99%