Sensitivity and noise analysis of SAW magnetic field sensors with varied magnetostrictive layer thicknesses

Kittmann, Anne; Müller, Claus; Durdaut, Phillip; Thormählen, Lars; Schell, Viktor; Niekiel, Florian; Lofink, Fabian; Meyners, Dirk; Knöchel, R.; Höft, Michael; McCord, Jeffrey; Quandt, Eckhard

doi:10.1016/j.sna.2020.111998

Cited by 22 publications

(23 citation statements)

References 31 publications

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“…The sensitivity of the fundamental mode measured here is only outperformed by the sensors described by Schell et al [ 11 ] with 2000

using a magnetic anisotropy controlled magnetostrictive layer or sensors with higher MS layer thicknesses [ 24 ]. Potentially, using these more enhanced layers, the overall sensitivity of the sensor geometry in this study could even surpass the one described there due to its enhanced magnetic sensitivity.…”

Section: Experimental Datamentioning

confidence: 84%

“…A

thick SiO 2 guiding layer is deposited with a PECVD process covering the IDT electrodes. Finally, a 200

(Fe 90 Co 10 ) 78 Si 12 B 10 (FeCoSiB) magnetostrictive layer is deposited by magnetron sputtering from a single target with composition of (Fe 90 Co 10 ) 78 Si 12 B 10 and structured using a lift-off process [ 24 ] to yield the geometry shown in Figure 1 . To promote adhesion and prevent oxidation, 10

Ta layers on both sides of the FeCoSiB layer were deposited.…”

Section: Experimental Datamentioning

confidence: 99%

“…Due to high mismatch losses and corresponding high insertion losses of about 55 dB to 65 dB, two amplifiers (ZFL-1000LN+ from Mini-Circuits) with a total gain of 50 dB were additionally connected between the sensor and the input of the phase noise analyzer. Contrary to the determined sensitivities based on numerically differentiating the static phase responses ( Figure 2 ), values for the sensitivities necessary for calculating the LOD were re-determined in the chosen magnetic operating point of

by means of a dynamic sensitivity measurement as described in [ 24 ]. Values of

(0th mode) and

(1st mode) were achieved.…”

Section: Appendix A1 For One-dimensional Modelmentioning

confidence: 99%

“…As already observed in a previous study [ 39 ], at low frequencies at which the thermal noise, i.e., the white phase noise, is negligible the power spectral density not only progresses proportional to

but is also higher than for the magnetically saturated device indicating a magnetic origin for the increased noise. Recently, it was found [ 24 ] that the

flicker phase noise in the sensor’s magnetic operating point is associated with hysteresis losses in the magnetic layer which increase with the sensitivity. In fact, it could be shown that the magnetically induced flicker phase noise is directly proportional to the sensitivity, leading to a LOD theoretically being independent of the sensitivity.…”

Section: Appendix A1 For One-dimensional Modelmentioning

confidence: 99%

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Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Schmalz

Kittmann

Durdaut

et al. 2020

Sensors

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A surface-acoustic-wave (SAW) magnetic-field sensor utilizing fundamental, first- and second-order Love-wave modes is investigated. A 4.5 μ m SiO2 guiding layer on an ST-cut quartz substrate is coated with a 200 n m (Fe90Co10)78Si12B10 magnetostrictive layer in a delay-line configuration. Love-waves are excited and detected by two interdigital transducers (IDT). The delta-E effect in the magnetostrictive layer causes a phase change with applied magnetic field. A sensitivity of 1250 ° / m T is measured for the fundamental Love mode at 263 M Hz . For the first-order Love mode a value of 45 ° / m T is obtained at 352 M Hz . This result is compared to finite-element-method (FEM) simulations using one-dimensional (1D) and two-and-a-half-dimensional (2.5 D) models. The FEM simulations confirm the large drop in sensitivity as the first-order mode is close to cut-off. For multi-mode operation, we identify as a suitable geometry a guiding layer to wavelength ratio of h GL / λ ≈ 1.5 for an IDT pitch of p = 12 μ m . For this layer configuration, the first three modes are sufficiently far away from cut-off and show good sensitivity.

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“…The sensitivity of the fundamental mode measured here is only outperformed by the sensors described by Schell et al [ 11 ] with 2000

Section: Experimental Datamentioning

confidence: 84%

“…A

thick SiO 2 guiding layer is deposited with a PECVD process covering the IDT electrodes. Finally, a 200

Ta layers on both sides of the FeCoSiB layer were deposited.…”

Section: Experimental Datamentioning

confidence: 99%

by means of a dynamic sensitivity measurement as described in [ 24 ]. Values of

(0th mode) and

(1st mode) were achieved.…”

Section: Appendix A1 For One-dimensional Modelmentioning

confidence: 99%

but is also higher than for the magnetically saturated device indicating a magnetic origin for the increased noise. Recently, it was found [ 24 ] that the

Section: Appendix A1 For One-dimensional Modelmentioning

confidence: 99%

See 2 more Smart Citations

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Schmalz

Kittmann

Durdaut

et al. 2020

Sensors

Self Cite

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“…In general, the sensitivity of Love wave magnetic field sensors is proportional to the thickness of the magnetostrictive phase, i.e., the thicker the magnetostrictive layer, the higher the sensitivity. The generated magnetic noise, however, shows the same dependency and therefore in a thickness range of 50 nm to 250 nm the resulting detectivity is virtually the same [433]. The detectivity in the ME sensors discussed so far is limited by different noise sources.…”

Section: Lf Me Sensorsmentioning

confidence: 91%

Roadmap on Magnetoelectric Materials and Devices

et al. 2021

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The possibility to tune the magnetic properties of materials with voltage (converse magnetoelectricity) or to generate electric voltage with magnetic fields (direct magnetoelectricity) has opened new avenues in a large variety of technological fields, ranging from information technologies to healthcare devices and including a great number of multifunctional integrated systems such as mechanical antennas, magnetometers, radiofrequency (RF) tunable inductors, etc., which have been realized due to the strong strainmediated magnetoelectric (ME) coupling found in ME composites. The development of singlephase multiferroic materials (which exhibit simultaneous ferroelectric and ferromagnetic or antiferromagnetic orders), multiferroic heterostructures, as well as progress in other ME mechanisms, such as electrostatic surface charging or magneto-ionics (voltage-driven ion migration) have a large potential to boost energy efficiency in spintronics and magnetic actuators. This paper focuses on existing ME materials and devices and reviews the state of the art in their

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Wireless Multifunctional Surface Acoustic Wave Sensor for Magnetic Field and Temperature Monitoring

Yang

Mengue

Mishra

et al. 2021

Adv Materials Technologies

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wireless magnetic sensors are designed to detect magnetic anomaly and are used for street installation, traffic control, and detection of the parking space availability. The sensor responds to changes in the earth's magnetic field caused by the presence of a vehicle, generally a metallic structure. Installation would be easier and cost-effective if the sensors are batteryless and could be installed into the asphalt or pavement (i.e., buried), thereby eliminating the risk of degradation and the need for regular maintenance, particularly the change of batteries. Another application example for wireless magnetic sensors concerns remote electric current sensing including transient-state electric currents on overhead power lines. Indeed, the development of smart grids requires the development of reliable and low-cost sensor networks. Monitoring electric currents at present and especially in medium and high voltage power lines is difficult and expensive when installing conventional sensors. [1,2] The indirect measurement of electric currents through the generated magnetic fields is an elegant solution. The sensor must also be insensitive to the temperature of the wire that strongly depends on the electric current flowing.Surface acoustic wave (SAW) devices are key components in communication systems and are widely used as filters, delay lines or resonators. They are still relevant for the development of 5G compatible technologies. [3,4] Because SAW devices are highly sensitive to physical parameters that affect SAW velocities, they also offer promising solutions as sensors in a wide range of applications. [5][6][7][8] SAW sensors have the advantage of being micro, passive, wireless, and even packageless in specific configurations. [9][10][11][12] SAW sensor technology allows simultaneous and independent measurement of temperatures and magnetic fields (i.e., electric current). SAW devices based on ferromagnetic films have been studied for the development of magnetic field and electric current sensors. [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28] However, the environment temperature is a factor affecting the performance of SAW sensors. An unavoidable fact is that SAW magnetic field sensors without temperature compensation are sensitive to both magnetic fields and temperatures due to the negative temperature coefficients of ferromagnetic films. [26,29] It leads to a difficulty in discrimination between them or their simultaneous measurement. Therefore, a SAW sensor that measures A one-port surface acoustic wave (SAW) resonator based on Co 40 -Fe 40 -B 20 / SiO 2 /ZnO/quartz multilayer structure and exhibiting a dual mode, Rayleigh and Love wave modes, is investigated to achieve a multifunctional sensor measuring both temperatures and magnetic fields. The Rayleigh wave mode of the resonator is used for temperature measurement with a temperature sensitivity of −37.9 ppm/°C, and the Love wave mode is used for magnetic field measurement. Co 40 -Fe 40 -B 20 is the magnetic sensitive layer, and quartz crysta...

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Sensitivity and noise analysis of SAW magnetic field sensors with varied magnetostrictive layer thicknesses

Cited by 22 publications

References 31 publications

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Roadmap on Magnetoelectric Materials and Devices

Wireless Multifunctional Surface Acoustic Wave Sensor for Magnetic Field and Temperature Monitoring

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