Sensitivity analysis and optimization method for the fabrication of one-dimensional beam-splitting phase gratings

Pacheco, Shaun; Brand, Jonathan F.; Zaverton, Melissa; Milster, Tom D.; Liang, Rongguang

doi:10.1364/oe.23.011771

Cited by 5 publications

(5 citation statements)

References 14 publications

(17 reference statements)

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“…The microlens array-grating can be fabricated and obtained by using soft lithography 30 . Since microlens array-grating includes two kinds of microstructure surfaces, microlens array and grating, the scale and structure of the two structures are very different, so the required processing means are also very different 31,32 , and it is difficult to construct on hard material 33 substrates, which makes the process difficult and costly, and is not conducive to batch production of high quality. The soft lithography process does not rely on expensive lithography equipment, is not limited by the accuracy constraints of light scattering, and is simple to operate 34 , and the resolution of the microstructures produced can reach the nanometer level 35 .…”

Section: Fabricationmentioning

confidence: 99%

Fabrication of a micro lens array-grating for a miniature spectrometer

Shan¹,

Liu²,

Li³

et al. 2022

Optical Design and Testing XII

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For the demand of line chromatic confocal displacement measurement, a new multi-channel compact spectrometer needs to be developed. In this paper, a microlens array-grating structure, in which one side is microlens array and the other side is blazed gating, is proposed for a miniature spectrometer. The microlens array-grating structure can be pressed in the form of "sandwich" by soft lithography using PDMS material. The micro lens array is a 10*10 mm square, consisting of 45*45 microlens elements, each with a diameter of 220 μm, and the outer diameters of the elements are closely connected with each other. The blazed grating is an equal period grating with a grating line density of 600 lines /mm and a blazed angle of 8°37’. By optimizing the design parameters, the image resolution of the spectrometer based on the grating-microlens array is within 1 nm in the wide band of 400 nm~700 nm. Different microlens grating surface elements have performance consistency with a standard deviation of about 0.5 nm, which can realize the function of arrayed micro-spectrometer.

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Section: Fabricationmentioning

confidence: 99%

Fabrication of a micro lens array-grating for a miniature spectrometer

Shan¹,

Liu²,

Li³

et al. 2022

Optical Design and Testing XII

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“…This composite structure makes these coatings extremely suitable for space applications. These coatings are stable in the space environment, mainly when a lightweight substrate is used [2].…”

Section: The Effect Of Blackening Temperature On the Absorption Coeff...mentioning

confidence: 99%

“…The black paints with organic binders contain considerable amounts of volatile material can weaken the equipment performance. The fabricated electroless nickel coating in this research results in weight loss in space applications, and with the stable black color can be used as an absorber coating [2,4].…”

Section: Hardness Testing Of Coatingsmentioning

confidence: 99%

“…The components of optical devices are always designed to help increase the light beams entry and reduce the intruder factors. Therefore, due to minimizing the pesky rays of the system and optimize the performance, the components of the systems should have the minimum reflection and maximum absorption [2]. So, the applied coatings should have a matte black color.…”

Section: Introductionmentioning

confidence: 99%

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The effect of pre-heat and post-heat treatment on the hardness and blackening process of electroless NiP deposits on titanium alloy

Alhaji¹,

Sadeghi²,

Kamali³

2020

Surf. Topogr.: Metrol. Prop.

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The black coatings were fabricated via electroless NiP deposits on Ti-6Al-4V alloy substrate with heat-treatment and blackening process. Two types of coatings were obtained: coatings with heat-treatment after blackening and coatings with blackening after haet-treatment. After parameter optimization, the temperature and pH of the solution were adjusted to 85 °C–95 °C and 4.3–4.7, respectively. The substrate was coated after the addition of modifying components to the solution. After refluxing the samples, the blackening process was done for 40 s in nitric acid (9molar). An SEM-EDS analyze used to assess the morphology and chemical composition of the coating. Moreover, adhesion strength and optical absorptance of the coating were measured by Pull Of test and Shimadzu UV-3100 analysis, respectively. The optical absorptance was measured by 0.89 and 0.95, respectively, for Oxalic acid and Nitric/Flouridric acid pretreated samples. Results showed that heat-treatment after blackening causes coating with higher micro-hardness and optical absorption. The blackened electroless NiP coating on Ti substrate with the heat-treatment of 4 h after the blackening process provided high solar absorption of 0.99, which is exceptionally suitable as a solar absorber coating for space and allied applications.

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“…While these gratings theoretically provide optimal efficiency into N outgoing beams, the presence of fabrication errors can significantly degrade their performance. However, consideration of fabrication errors in the design can significantly improve tolerances [8]. Applications that benefit from beam-splitting gratings are parallel processing in laser machining and material processing, sensor systems, interferometry, communication systems, and image processing and gathering system [9].…”

Section: Introductionmentioning

confidence: 99%

Analysis of grating doublets for achromatic beam-splitting

Pacheco¹,

Milster²,

Liang³

2015

Opt. Express

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Achromatic beam-splitting grating doublets are designed for both continuous phase and binary phase gratings. By analyzing the sensitivity to lateral shifts between the two grating layers, it is shown that continuous-profile grating doublets are extremely difficult to fabricate. Achromatic grating doublets that have profiles with a constant first spatial derivative are significantly more resistant to lateral shifts between grating layers, where one design case showed a 17 times improvement in performance. Therefore, binary phase, multi-level phase, and blazed grating doublets perform significantly better than continuous phase grating doublets in the presence of a lateral shift between two grating layers. By studying the sensitivity to fabrication errors in the height of both grating layers, one grating layer height can be adjusted to maintain excellent performance over a large wavelength range if the other grating layer is fabricated incorrectly. It is shown in one design case that the performance of an achromatic Dammann grating doublet can be improved by a factor of 215 if the heights of the grating layers are chosen to minimize the performance change in the presence of fabrication errors.

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Sensitivity analysis and optimization method for the fabrication of one-dimensional beam-splitting phase gratings

Cited by 5 publications

References 14 publications

Fabrication of a micro lens array-grating for a miniature spectrometer

Fabrication of a micro lens array-grating for a miniature spectrometer

The effect of pre-heat and post-heat treatment on the hardness and blackening process of electroless NiP deposits on titanium alloy

Analysis of grating doublets for achromatic beam-splitting

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