Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics

Westerveld, W.J.; Mahmud-Ul-Hasan,; Shnaiderman, Rami; Ntziachristos, Vasilis; Rottenberg, Xavier; Severi, S.; Rochus, Véronique

doi:10.1038/s41566-021-00776-0

Cited by 161 publications

(105 citation statements)

References 31 publications

Supporting

Mentioning

102

Contrasting

Order By: Relevance

“…In addition to 2D ultrasound transducer arrays based on piezoelectric materials, optical ultrasound detectors, such as the Fabry–Perot interferometer, 58 , 59 micro-ring resonator, 60 and Bragg grating fiber, 61 – 63 have been actively explored for volumetric PACT. Compared with piezoelectric transducers, optical ultrasound detectors often have smaller size (

), larger detection bandwidth and receiving angle, higher detection sensitivity per unit area, better transmittance of the PA excitation light, and simpler PA signal readout, all of which can help improve the resolution and penetration depth of volumetric PACT.…”

Section: Technical Advances In Patmentioning

confidence: 99%

“… 102 (b) A 3D human palm image obtained the system in (a) with a total imaging time of 10 s. (c) Schematic and photograph of a micro-ring-resonator using silicon photonic technology. 60 (d) The optical transmission spectrum of a multiplexed micro-ring-resonator array with 10 sensors. (e) Representative 3D image of three stacked polyamide sutures obtained by the micro-ring resonator in (a).…”

Section: Technical Advances In Patmentioning

confidence: 99%

“…Other optical ultrasound sensors, including polymer micro-ring 60 and Bragg-grating fiber, 61 have recently been demonstrated as point-like detectors in PAT, often with sensor sizes that are orders of magnitude smaller than their piezoelectric counterparts. However, one major obstacle met by these optical sensors is the extreme difficulty in scaling up the production while maintaining consistent optical properties, such as the optical resonant wavelength, Q factor, and transmission efficiency.…”

Section: Technical Advances In Patmentioning

confidence: 99%

“…To address this issue, Westerveld et al. 60 have developed a new micro-ring-resonator using silicon photonic technology [ Fig. 4(c) ].…”

Section: Technical Advances In Patmentioning

confidence: 99%

“…Similarly, Westerveld et al. 60 recently demonstrated a micro-ring resonator using a thin layer of acoustic membrane to isolate the ring structure from the environment, which can potentially improve the sensor’s stability in water. To overcome the thermal stability of the Fabry–Perot interferometer, Chen et al.…”

Section: Technical Advances In Patmentioning

confidence: 99%

See 4 more Smart Citations

Perspective on fast-evolving photoacoustic tomography

Yao

Wang

2021

J. Biomed. Opt.

View full text Add to dashboard Cite

: Significance: Acoustically detecting the rich optical absorption contrast in biological tissues, photoacoustic tomography (PAT) seamlessly bridges the functional and molecular sensitivity of optical excitation with the deep penetration and high scalability of ultrasound detection. As a result of continuous technological innovations and commercial development, PAT has been playing an increasingly important role in life sciences and patient care, including functional brain imaging, smart drug delivery, early cancer diagnosis, and interventional therapy guidance. Aim: Built on our 2016 tutorial article that focused on the principles and implementations of PAT, this perspective aims to provide an update on the exciting technical advances in PAT. Approach: This perspective focuses on the recent PAT innovations in volumetric deep-tissue imaging, high-speed wide-field microscopic imaging, high-sensitivity optical ultrasound detection, and machine-learning enhanced image reconstruction and data processing. Representative applications are introduced to demonstrate these enabling technical breakthroughs in biomedical research. Conclusions: We conclude the perspective by discussing the future development of PAT technologies.

show abstract

Section: Technical Advances In Patmentioning

confidence: 99%

Section: Technical Advances In Patmentioning

confidence: 99%

Section: Technical Advances In Patmentioning

confidence: 99%

“…To address this issue, Westerveld et al. 60 have developed a new micro-ring-resonator using silicon photonic technology [ Fig. 4(c) ].…”

Section: Technical Advances In Patmentioning

confidence: 99%

Section: Technical Advances In Patmentioning

confidence: 99%

See 3 more Smart Citations

Perspective on fast-evolving photoacoustic tomography

Yao

Wang

2021

J. Biomed. Opt.

View full text Add to dashboard Cite

show abstract

Nanomechanical Dissipation and Strain Engineering

Sementilli

Romero

Bowen

2021

Adv Funct Materials

View full text Add to dashboard Cite

Nanomechanical resonators have applications in a wide variety of technologies ranging from biochemical sensors to mobile communications, quantum computing, inertial sensing, and precision navigation. The quality factor of the mechanical resonance is critical for many applications. Until recently, mechanical quality factors rarely exceeded a million. In the past few years however, new methods have been developed to exceed this boundary. These methods involve careful engineering of the structure of the nanomechanical resonator, including the use of acoustic bandgaps and nested structures to suppress dissipation into the substrate, and the use of dissipation dilution and strain engineering to increase the mechanical frequency and suppress intrinsic dissipation. Together, they have allowed quality factors to reach values near a billion at room temperature, resulting in exceptionally low dissipation. This review aims to provide a pedagogical introduction to these new methods, primarily targeted to readers who are new to the field, together with an overview of the existing state‐of‐the‐art, what may be possible in the future, and a perspective on the future applications of these extreme‐high quality resonators.

show abstract

High Q‐Factor Polymer Microring Resonators Realized by Versatile Damascene Soft Nanoimprinting Lithography

Lin,

Liu,

Lee

et al. 2024

Adv Funct Materials

View full text Add to dashboard Cite

High‐quality‐factor microring resonators are highly desirable in many applications. Fabricating a microring resonator typically requires delicate instruments to ensure a smooth side wall of waveguides and 100‐nm critical feature size in the coupling region. In this work, a new method “damascene soft nanoimprinting lithography” is demonstrated that can create high‐fidelity waveguide by simply backfilling an imprinted cladding template with a high refractive index polymer core. This method can easily realize high Q‐factor polymer microring resonators (e.g., ≈5 × 105 around 770 nm wavelength) without the use of any expensive instruments and can be conducted in a normal lab environment. The high Q‐factors can be attributed to the residual layer‐free feature and controllable meniscus cross‐section profile of the filled polymer core. Furthermore, the new method is compatible with different polymers, yields low fabrication defects, enables new functionalities, and allows flexible substrate. These benefits can broaden the applicability of the fabricated microring resonator.

show abstract

Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics

Cited by 161 publications

References 31 publications

Perspective on fast-evolving photoacoustic tomography

Perspective on fast-evolving photoacoustic tomography

Nanomechanical Dissipation and Strain Engineering

High Q‐Factor Polymer Microring Resonators Realized by Versatile Damascene Soft Nanoimprinting Lithography

Contact Info

Product

Resources

About