Abstract. High-resolution ultrasound imaging requires quality sensors with wide bandwidth and high sensitivity, as shown in a wide range of applications, including intravascular imaging of cardiovascular diseases. However, piezoelectric technology, the current dominant approach for hydrophone fabrication, has encountered many technical limitations in the high-frequency range. Using optical techniques for the detection of high-frequency ultrasound signals has attracted much recent attention. One of the most studied approaches is based on a Fabry-Pérot interferometer, consisting of an optical cavity sandwiched between two mirrors. This technique offers promising sensitivity and bandwidth, and a potential alternative to piezoelectric polyvinylidene fluoride (PVDF) hydrophones. We propose an innovative optical ultrasound sensor using only a single mirror in a total-internal-reflection configuration. Besides retaining the advantages of Fabry-Pérot interferometer-based ultrasound sensors, this unique design provides a bandwidth of at least 160 MHz, a potential decrease in fabrication cost, and an increase in signal fidelity. There is a pervasive demand for high-resolution imaging techniques for comprehensive morphological and functional imaging of critical biological organs covered by thick tissue layers. Optical microscopy normally provides superior resolution but with shallow imaging depth in scattering media. In contrast, acoustic imaging enables deep tissue imaging but with relatively low spatial resolution, restricted by the frequency range employed in conventional diagnostic ultrasound imaging. In principle, ultrasound imaging resolution can be improved by using higher frequencies (e.g., 50 MHz). However, for a conventional piezoelectric-based ultrasound sensor, higher operation frequency demands smaller effective sensor size, 1 which imposes several technological difficulties in the fabrication of miniature piezoelectric ultrasound sensors. The challenges include dicing piezoceramics to micrometer-size elements, 2 making electrical connections to the small elements, cross talk between elements, and increased detection noise due to reduced element size.3 Although recently developed miniature polyvinylidene fluoride (PVDF) membrane hydrophones can potentially achieve 4, 5 a frequency bandwidth beyond 140 MHz, demanding electrical connections and cross talk persist if these membrane hydrophones are intended for imaging arrays. Furthermore, it has been reported that the noise-equivalent pressure (NEP) of a 50-μm-diam Fabry-Pérot optical ultrasound sensor is comparable to that of 1-mm-diam PVDF membrane hydrophone. 6 Given that the sensitivity of a membrane hydrophone decreases as its area becomes smaller due to lower capacitance, 7 the Fabry-Pérot ultrasound sensor can potentially outperform the PVDF membrane sensor with the same active area.
8As discussed in recent publications, 3,6,[8][9][10][11][12][13][14][15][16] optical ultrasound sensors have the potential to overcome many of the challenges just mentioned. F...