Sensitive elements of microelectronic sensors of fast variable and static pressure

Abstract

The technical progress development contributes to the introduction of automated methods of management and control of the system state. The use of sensor equipment with the use of piezoelectric tensor-resistive modules allows to register fast variable and statistical pressure, respectively. Such assemblies possess not only the most reliable information content of the measured values, but also combine simple step-by-step manufacturing techniques.

Multilayer thin-film resistive structures with temperature self-compensation for super-precision resistors and strain gauges

“…Thin-film resistors are widely used in information-measuring and control systems (IMS) for harsh operating conditions [1]. They have a high linearity of output characteristics and are distinguished by simplicity of design solutions.…”

“…Temperature is the main destabilizing factor, as a result of which the discrepancy between the characteristics of thin-film resistors concerns precisely thermal stability. Temperature errors are 60% or more of the total additional error from all operating conditions during operation [7,8]. In addition, temperature leads to degradation processes developing in thin films, disrupting their structure and phase composition [9].…”