Sensing properties of palladium-gate MOS (Pd-MOS) hydrogen sensor-based on plasma grown silicon dioxide

Hydrogen sensor of Pd-decorated tubular TiO2 layer prepared by anodization with patterned electrodes on SiO2/Si substrate

“…Therefore, hydrogen sensors are crucially needed to detect any hydrogen leakage; as well as, precisely measure the hydrogen concentration in the hydrogen fuel cell system during all stages of hydrogen production, transportation and storage [6,7] Page 3 of 34 A c c e p t e d M a n u s c r i p t 3 Many types of hydrogen sensors, such as, electrochemical [8], optical [9], catalytic [10,11], thermally conductive [12] and metal oxide semiconductor sensors [13,14], have been studied and commercialized. Metal oxide gas sensors have been widely used for hydrogen gas sensor applications because of their high sensitivity, fast response, long lifespan and feasibility to be miniaturized for use in the microelectronic devices.…”

All-optical hydrogen sensor based on a high alloy content palladium thin film

“…The demand for using hydrogen as a next generation, clean and renewable energy source has stimulated considerable efforts towards developing sensitive, reliable, and cost effective hydrogen sensors for the fast detection of hydrogen leaks below the lower explosive limit (LEL) of 4.65% by volume ratio of hydrogen to air [1][2][3][4][5]. Currently, Pd or Pd-based alloys are commonly used as the sensing material, due to Pd's high sensitivity and selectivity towards hydrogen.…”

Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever

“…This feature makes the MOS transistor applied to the many micro sensors as well as the circuit unit. The pH sensor (Cane´et al 1997;Pourciel-Gouzy et al 2004;Martinoia et al 2005), the charge sensor (Kim et al 2004), the pressure sensor (Hynes et al 1999) and the gas sensor (Dwivedi et al 2000) are the representative sensors.…”