2017
DOI: 10.1016/j.sna.2017.08.042
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Sensing elements space design of hot-film sensor array considering thermal crosstalk

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Cited by 21 publications
(16 citation statements)
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“…The guarding heater of the dual-layer sensor was fabricated in the same way as the single-layer hot film sensor [ 27 ]. Polydimethylsiloxane (PDMS) was spin-coated as an adhesive between the PI foil and the glass carrier.…”
Section: Fabricationmentioning
confidence: 99%
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“…The guarding heater of the dual-layer sensor was fabricated in the same way as the single-layer hot film sensor [ 27 ]. Polydimethylsiloxane (PDMS) was spin-coated as an adhesive between the PI foil and the glass carrier.…”
Section: Fabricationmentioning
confidence: 99%
“…The center alignment error of the two-layer structures was less than 0.8 µm, and the total thickness of the dual-layer sensor was within 80 µm. The guarding heater of the dual-layer sensor was fabricated in the same way as the single-layer hot film sensor [27]. Polydimethylsiloxane (PDMS) was spin-coated as an adhesive between the PI foil and the glass carrier.…”
Section: Fabricationmentioning
confidence: 99%
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“…The detection found that the velocity vectors in the range of 0°-180°could be measured by three sensors with a 30°distribution. Figure 8(b) shows a flexible one-way thermal sensor for measuring the flow magnitude and shear stress on the surface of the wind tunnel model [150]. It was fabricated through flexible electronics technology determined minimum non-thermal crosstalk spaces between two adjacent elements.…”
Section: Flexible Flow Sensorsmentioning
confidence: 99%
“…The fabrication processes of the flexible hot-film sensor array are shown in Figure 2 [ 19 ]. A ready-made polyimide (PI) foil in the thickness of 50 μm is used as the sensor substrate.…”
Section: Flexible Hot-film Sensormentioning
confidence: 99%