2022
DOI: 10.1016/j.jallcom.2022.164893
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Semimetal hR6-CaSi2 thin film: A transparent contact for Si optoelectronics

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Cited by 7 publications
(13 citation statements)
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“…To explore, in depth, the Si-compatible technology paradigm, we implemented the recently described concept of using a semimetal calcium disilicide top electrode [ 30 ]. Briefly, CaSi 2 demonstrates a high figure of merit as a transparent conducting material, while its constituents are non-toxic and earth abundant.…”
Section: Resultsmentioning
confidence: 99%
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“…To explore, in depth, the Si-compatible technology paradigm, we implemented the recently described concept of using a semimetal calcium disilicide top electrode [ 30 ]. Briefly, CaSi 2 demonstrates a high figure of merit as a transparent conducting material, while its constituents are non-toxic and earth abundant.…”
Section: Resultsmentioning
confidence: 99%
“…This explained the increase in total reflection, presented in Figure 4 b. We speculated that the higher VIS reflection may have resulted from the transparency window of the CaSi 2 lying in the spectral range of 550–2000 nm [ 30 ]. Nonetheless, the CaSi 2 cover successfully fulfilled the requirements of both low sheet resistance (~35 Ω/sq.)…”
Section: Resultsmentioning
confidence: 99%
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“…39) The most important factor that was previously discovered in polycrystalline CaSi 2 films is a combination of high conductivity and sufficiently high transparency in the IR range. [39][40][41] In fact, a relatively thick (130 nm) hR6-CaSi 2 film was characterized by an optical transparency no worse than 20% in the NIR and MIR spectral ranges, reaching a transmittance of 47% at a wavelength of 1550 nm and maintaining a low specific electric (87 μΩ × cm) and sheet (6.6 Ω/□) resistances at room temperature. [39][40][41] It has been shown that hR6-CaSi 2 films on silicon, having a high standardized quality factor of 0.2 Ω −1 , are suitable for silicon-based optoelectronics, competing with other modern transparent conductive materials, such as ITO (indium-tin oxide).…”
Section: Introductionmentioning
confidence: 99%
“…[39][40][41] In fact, a relatively thick (130 nm) hR6-CaSi 2 film was characterized by an optical transparency no worse than 20% in the NIR and MIR spectral ranges, reaching a transmittance of 47% at a wavelength of 1550 nm and maintaining a low specific electric (87 μΩ × cm) and sheet (6.6 Ω/□) resistances at room temperature. [39][40][41] It has been shown that hR6-CaSi 2 films on silicon, having a high standardized quality factor of 0.2 Ω −1 , are suitable for silicon-based optoelectronics, competing with other modern transparent conductive materials, such as ITO (indium-tin oxide). 42,43) The CaSi 2 film grown on a sapphire substrate demonstrated optical transparency in the visible region.…”
Section: Introductionmentioning
confidence: 99%