2004
DOI: 10.1063/1.1762995
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Semiconductor to metal phase transition in the nucleation and growth of VO2 nanoparticles and thin films

Abstract: The optical and morphological characteristics of vanadium dioxide nanoparticles and thin films during their nucleation and growth phases have been studied by correlating the temperature and sharpness of the transition with the processing parameters. Thermal annealing results in grain growth and improved crystallinity. Normally, larger crystallites show smaller hysteresis, as there is a greater probability of finding a nucleating defect in the larger volume. But at the same time, this improved crystal perfectio… Show more

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Cited by 338 publications
(222 citation statements)
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“…37 A vanadium-metal target is ablated in 250 mTorr of oxygen by a KrF excimer laser (repetition rate 25 Hz) at a wavelength of 248 nm and a fluence of 4 mJ/cm 2 . The as-grown films are nonstoichiometric with an approximate composition close to VO 1.7 .…”
Section: Methodsmentioning
confidence: 99%
“…37 A vanadium-metal target is ablated in 250 mTorr of oxygen by a KrF excimer laser (repetition rate 25 Hz) at a wavelength of 248 nm and a fluence of 4 mJ/cm 2 . The as-grown films are nonstoichiometric with an approximate composition close to VO 1.7 .…”
Section: Methodsmentioning
confidence: 99%
“…So, understanding the origin of the hysteresis can lead to a better control of its properties. The VO 2 thermal hysteresis characteristics are found to vary between samples grown under different conditions, such as thickness of thin films 16 , growth temperature 17 , grain size 18 , and choice of substrate 3,19 . For example, in polycrystalline thin films and single crystals of VO 2 embedded in silicon, the hysteresis width grows with decreasing of the crystallite size 18 .…”
Section: Introductionmentioning
confidence: 99%
“…This is to demonstrate how the crystalline grains sizes affect the transition temperature, but seems to be contradicting with what have been reported in the literature so far. Suh et al [31] undertook a careful study of the SMT transition of VO 2 films on (1 0 0) silicon substrates as a function of annealing time and found that the microstructure of the films changed from nanocrystalline nearly amorphous to crystals with a diameter of 200 nm. In the early stages, the film showed that as the grain size increased, the SMT decreased, but hysteresis continued to increase.…”
Section: Resultsmentioning
confidence: 99%