Sem Study of Conical Structures on Polycarbonate Surface Induced by ArF Laser

Abstract

The surface modifi cation of polycarbonate (PC) by 193 nm ArF laser radiation with fl uences of 24-62 mJ/cm 2 and pulse numbers of 1-100 is reported. Noticeable changes including microcone structures on irradiated surfaces have been observed through scanning electron microscope (SEM). It has been shown that the geometrical characteristics (apex angle and base diameter) of the microcones depend on the incident laser fl uence. With the increase of the radiation fl uence the microcone apexes become sharper, however, their base diameters increase.