SEM-based system for 100nm x-ray tomography for the analysis of porous silicon

Bleuet, Pierre; Laloum, D.; Audoit, G.; Torrecillas, Ramón; Gaillard, F.

doi:10.1117/12.2059065

Cited by 2 publications

(2 citation statements)

References 25 publications

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“…In a SEM, cone beam X-ray can also be generated from finely focused electrons on a thin foil target. The X-ray source size can be limited by smaller interaction volume between the electrons and the thinner target, and produce the XRT with a resolution better than 100 nm [ 84 , 85 ]. Higher resolution in tens of nanometers are routinely available by employing X-ray objective lens as FZP to magnify full field imaging for both LB and SR-XRT.…”

Section: Introductionmentioning

confidence: 99%

Correlation of Materials Property and Performance with Internal Structures Evolvement Revealed by Laboratory X-ray Tomography

Zhang

Wang

2018

Materials

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Although X-rays generated from a laboratory-based tube cannot be compared with synchrotron radiation in brilliance and monochromaticity, they are still viable and accessible in-house for ex situ or interrupted in situ X-ray tomography. This review mainly demonstrates recent works using laboratory X-ray tomography coupled with the measurements of properties or performance testing under various conditions, such as thermal, stress, or electric fields. Evolvements of correlated internal structures for some typical materials were uncovered. The damage features in a graded metallic 3D mesh and a metallic glass under mechanical loading were revealed and investigated. Micro-voids with thermal treatment and void healing phenomenon with electropulsing were clearly demonstrated and quantitatively analyzed. The substance transfer around an electrode of a Li-S battery and the protective performance of a Fe-based metallic glass coating on stainless steel were monitored through electrochemical processes. It was shown that in situ studies of the laboratory X-ray tomography were suitable for the investigation of structure change under controlled conditions and environments. An extension of the research for in situ laboratory X-ray tomography can be expected with supplementary novel techniques for internal strain, global 3D grain orientation, and a fast tomography strategy.

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Section: Introductionmentioning

confidence: 99%

Correlation of Materials Property and Performance with Internal Structures Evolvement Revealed by Laboratory X-ray Tomography

Zhang

Wang

2018

Materials

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“…In a SEM, cone beam X-ray can also be generated from finely focused electrons on a thin foil target. The X-ray source size can be limited by smaller interaction volume between the electrons and the thinner target, and produce the XRT with a resolution better than 100 nm [84,85]. Higher resolution in tens of nanometers are routinely available by employing X-ray objective lens as FZP to magnify full field imaging for both LB and SR-XRT.…”

Section: Effective Factors Of Lb-xrtmentioning

confidence: 99%

In-Situ X-Ray Tomographic Study of Materials

Maire¹,

Adrien²,

Withers³

2020

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X-ray computed tomography (CT) is advancing apace both in terms of the spatial resolution that can be achieved and the rate at which the radiographs necessary to reconstruct a 3D image can be collected. These advances combined with the fact that CT is inherently non-destructive mean that X-ray CT is moving simply from the collection of 3D images to the acquisition of 3D movies. Whether it is to collect information of rapidly changing behaviors, such as fracture, where live streaming of many 1000's of radiographs per second are needed to follow the events in situ, exploiting the intensity of a synchrotron X-ray source, or the longer timescales associated with long term oxidation, where time-lapse ex situ observations made by laboratory CT sources, X-ray CT provides unique insights into the behavior of natural and man-made materials that simply cannot be obtained by any other means.This book is a collection of chapters. It celebrates the possibilities for gaining inside information through time resolved X-ray CT looking both at the technical developments and opportunities for improving the quality and quantification of the image data we collect to the range of questions that X-ray CT can shine light upon. It is clear from this collection that many different environments and external constraints can be applied to the materials in situ whether to form the material or to observe its degradation or healing. We are sure that these chapters only represent the tip of the iceberg and that time-resolved X-ray CT, whether exploiting the intensity of a synchrotron or the accessibility or laboratory CT systems, will continue to develop into an indispensable characterization tool, alongside optical and electron microscopy. Further, we believe that the imaging modes, whether to detect subtle changes in phase, crystallographic structure or to fingerprint the elements contained in phases, will expand to provide an even richer picture of the internal structure of materials and their evolution over time than we can achieve today. We hope that this book shows the future or time resolved imaging is indeed very bright.

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SEM-based system for 100nm x-ray tomography for the analysis of porous silicon

Cited by 2 publications

References 25 publications

Correlation of Materials Property and Performance with Internal Structures Evolvement Revealed by Laboratory X-ray Tomography

Correlation of Materials Property and Performance with Internal Structures Evolvement Revealed by Laboratory X-ray Tomography

In-Situ X-Ray Tomographic Study of Materials

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