33rd European Mask and Lithography Conference 2017
DOI: 10.1117/12.2280828
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SEM AutoAnalysis: enhancing photomask and NIL defect disposition and review

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Cited by 4 publications
(4 citation statements)
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“…Wang, Wu, Liu, & Xing, 2017), (Guldi, 2004), (Egger, Griitzner, Burmer, & Dudkiewicz, 2007), (Gil et al, 2017), (Chertkov, Disyuk, Pimenov, & Aksenova, 2017), (Luka et al, 2016), (Chuang & Lee, 2004) Business Economics 48 (4,29%) (Isack, Mutingi, Kandjeke, Vashishth, & Chakraborty, 2018), (Mahendrawathi, Zayin, & Pamungkas, 2017), (Samopa, Astuti, & Lestari, 2017), (Wieczerniak, Cyplik, & Milczarek, 2017), (Richter, Aymelek, & Mattfeld, 2017), (Usman & Rendy, 2017), (Aligula, Kok, & Sim, 2017), (Sawalha, 2017), (Claxton & Campbell-Allen, 2017), (Markopoulos & Vanharanta, 2017) Optics 33 (2,95%) (X. Wang et al, 2010), (Giollo, Lam, Gkorou, Liu, & van Haren, 2017), (Schulz, Egodage, Tabbone, Ehrlich, & Garetto, 2017), (Xie, Venkatachalam, Lee, Chen, & Zafar, 2017), (Horvath, Krkos, & Dubravec, 2017), (Tchikoulaeva, Holfeld, Arend, & Foca, 2008), (Mora et al, 2016), (Gutjahr et al, 2016), (McCroskey, Abell, & Chidester, 2000),…”
Section: Primary Objectivementioning
confidence: 99%
“…Wang, Wu, Liu, & Xing, 2017), (Guldi, 2004), (Egger, Griitzner, Burmer, & Dudkiewicz, 2007), (Gil et al, 2017), (Chertkov, Disyuk, Pimenov, & Aksenova, 2017), (Luka et al, 2016), (Chuang & Lee, 2004) Business Economics 48 (4,29%) (Isack, Mutingi, Kandjeke, Vashishth, & Chakraborty, 2018), (Mahendrawathi, Zayin, & Pamungkas, 2017), (Samopa, Astuti, & Lestari, 2017), (Wieczerniak, Cyplik, & Milczarek, 2017), (Richter, Aymelek, & Mattfeld, 2017), (Usman & Rendy, 2017), (Aligula, Kok, & Sim, 2017), (Sawalha, 2017), (Claxton & Campbell-Allen, 2017), (Markopoulos & Vanharanta, 2017) Optics 33 (2,95%) (X. Wang et al, 2010), (Giollo, Lam, Gkorou, Liu, & van Haren, 2017), (Schulz, Egodage, Tabbone, Ehrlich, & Garetto, 2017), (Xie, Venkatachalam, Lee, Chen, & Zafar, 2017), (Horvath, Krkos, & Dubravec, 2017), (Tchikoulaeva, Holfeld, Arend, & Foca, 2008), (Mora et al, 2016), (Gutjahr et al, 2016), (McCroskey, Abell, & Chidester, 2000),…”
Section: Primary Objectivementioning
confidence: 99%
“…Wang, Wu, Liu, & Xing, 2017), (Guldi, 2004), (Egger, Griitzner, Burmer, & Dudkiewicz, 2007), (Gil et al, 2017), (Chertkov, Disyuk, Pimenov, & Aksenova, 2017), (Luka et al, 2016), (Chuang & Lee, 2004) Business Economics 48 (4,29%) (Isack, Mutingi, Kandjeke, Vashishth, & Chakraborty, 2018), (Mahendrawathi, Zayin, & Pamungkas, 2017), (Samopa, Astuti, & Lestari, 2017), (Wieczerniak, Cyplik, & Milczarek, 2017), (Richter, Aymelek, & Mattfeld, 2017), (Usman & Rendy, 2017), (Aligula, Kok, & Sim, 2017), (Sawalha, 2017), (Claxton & Campbell-Allen, 2017), (Markopoulos & Vanharanta, 2017) Optics 33 (2,95%) (X. Wang et al, 2010), (Giollo, Lam, Gkorou, Liu, & van Haren, 2017), (Schulz, Egodage, Tabbone, Ehrlich, & Garetto, 2017), (Xie, Venkatachalam, Lee, Chen, & Zafar, 2017), (Horvath, Krkos, & Dubravec, 2017), (Tchikoulaeva, Holfeld, Arend, & Foca, 2008), (Mora et al, 2016), (Gutjahr et al, 2016), (McCroskey, Abell, & Chidester, 2000),…”
Section: Primary Objectivementioning
confidence: 99%
“…Wang, Wu, Liu, & Xing, 2017), (Guldi, 2004), (Egger, Griitzner, Burmer, & Dudkiewicz, 2007), (Gil et al, 2017), (Chertkov, Disyuk, Pimenov, & Aksenova, 2017), (Luka et al, 2016), (Chuang & Lee, 2004) Business Economics 48 (4,29%) (Isack, Mutingi, Kandjeke, Vashishth, & Chakraborty, 2018), (Mahendrawathi, Zayin, & Pamungkas, 2017), (Samopa, Astuti, & Lestari, 2017), (Wieczerniak, Cyplik, & Milczarek, 2017), (Richter, Aymelek, & Mattfeld, 2017), (Usman & Rendy, 2017), (Aligula, Kok, & Sim, 2017), (Sawalha, 2017), (Claxton & Campbell-Allen, 2017), (Markopoulos & Vanharanta, 2017) Optics 33 (2,95%) (X. Wang et al, 2010), (Giollo, Lam, Gkorou, Liu, & van Haren, 2017), (Schulz, Egodage, Tabbone, Ehrlich, & Garetto, 2017), (Xie, Venkatachalam, Lee, Chen, & Zafar, 2017), (Horvath, Krkos, & Dubravec, 2017), (Tchikoulaeva, Holfeld, Arend, & Foca, 2008), (Mora et al, 2016), (Gutjahr et al, 2016), (McCroskey, Abell, & Chidester, 2000),…”
Section: Primary Objectivementioning
confidence: 99%