Self-tuning in master–slave synchronization of high-precision stage systems

Heertjes, Marcel; Temizer, Burak; Schneiders, M.

doi:10.1016/j.conengprac.2013.08.007

Cited by 26 publications

(10 citation statements)

References 30 publications

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“…Furthermore, performance is limited due to the causal nature of the input disturbance measurement, i.e. the disturbance occurs prior to detection and compensation [37,38,39]. This causality argument results in the fact that active vibration isolation deteriorates performance at high frequencies due to a waterbed effect [38].…”

Section: Resultsmentioning

confidence: 99%

Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators

Beijen

Heertjes

Dijk

et al. 2018

Control Engineering Practice

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This paper proposes a multi-input multi-output (MIMO) disturbance feedforward controller to improve the rejection of floor vibrations in active vibration isolation systems for high-precision machinery. To minimize loss of performance due to model uncertainties, the feedforward controller is implemented as a self-tuning generalized FIR filter. This filter contains a priori knowledge of the poles, such that relatively few parameters have to be estimated which makes the algorithm computationally efficient. The zeros of the filter are estimated using the filtered-error least mean squares (FeLMS) algorithm. Residual noise shaping is used to reduce bias. Conditions on convergence speed, stability, bias, and the effects of sensor noise on the self-tuning algorithm are discussed in detail. The combined control strategy is validated on a 6-DOF Stewart platform, which serves as a multi-axis and hard-mounted vibration isolation system, and shows significant improvement in the rejection of floor vibrations.

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Section: Resultsmentioning

confidence: 99%

Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators

Beijen

Heertjes

Dijk

et al. 2018

Control Engineering Practice

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“…where p s is output pressure of the LS pump, p m is maximum load pressure, which is gotten by a shuttle valve in the LS valve and feedback to the variable mechanism in the LS pump, p d is compensate pressure of variable mechanism, normally is set to 1.5 MPa. The equation (1) indicates that the LS pump could always supply p d more pressure than the maximum load pressure p m , which achieves pressure following and avoids pressure loss.…”

Section: System Molding Under Steady Statementioning

confidence: 99%

A new hydraulic synchronous scheme in open-loop control: Load-sensing synchronous control

Ding

Liu

Zhao

2020

Measurement and Control

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At present, open-loop synchronous control for hydraulic systems widely using synchronous valves has low synchronous accuracy due to weak anti-bias capacity, and is hard to adjust synchronization velocity, so it could not meet the requirements of accurate synchronization under severe conditions. In this paper, a load-sensing synchronous control is developed to obtain accurate synchronization in open-loop control, which is made up of a load-sensing unit and a synchronous valve. In the load-sensing loop, a load-sensing pump supplies pressure and flow required by the system through pressure closed-loop control, and a load-sensing valve could improve the capability of anti-offset loads by pressure compensation. The synchronous valve is between the load-sensing pump and load-sensing valve, to achieve equal distribution of flow supplied by the pump, which could improve the divider accuracy of the load-sensing system. A test system within load-sensing synchronous control is established, and then comparison experiments under different partial loads are carried out. The experimental results show that, compared with the traditional synchronous valve control, the load-sensing synchronous control has the advantages of higher synchronous precision, higher energy efficiency and also the ability of velocity regulation. Load-sensing synchronous control has the potential of high precision synchronization control in server environments.

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“…Examples include high-density tape cartridges for data storage [13], high-speed optical disk drives [12], microrobots inside a scanning electron microscope [8], and the wafer scanning systems used to produce integrated circuits (ICs) [5], [9], [10], [16]. In order to fulfill their tasks, these systems usually require the synchronization of two or more subsystems.…”

Section: Introductionmentioning

confidence: 99%

Common zeros in synchronization of high-precision stage systems

Navarrete

Heertjes

Schmidt

2015

2015 IEEE International Conference on Mechatronics (ICM)

Self Cite

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In synchronization of high-precision motion systems, in particular the synchronization between a wafer stage system and a reticle stage system of a wafer scanner, a novel feedforward structure is studied. In this structure, the numerator of each plant model is described by an input shaping filter capturing the zeros of said model. The denominator is described by a feedforward filter capturing the poles. Ideally, this gives zero error tracking of both the reticle and wafer stage systems without the need for plant inversion. But in view of the different input shaping filter operations, appropriate synchronization behavior is not guaranteed. To obtain both appropriate tracking and synchronization behavior, we propose to augment the reticle stage filters with the zeros from the wafer stage plant model. Reversely, the wafer stage filters are augmented with the zeros from the reticle stage plant model. The feasibility of such an approach is confirmed by simulation results and, to some extend, by measurement results obtained from an industrial wafer scanner.

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Self-tuning in master–slave synchronization of high-precision stage systems

Cited by 26 publications

References 30 publications

Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators

Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators

A new hydraulic synchronous scheme in open-loop control: Load-sensing synchronous control

Common zeros in synchronization of high-precision stage systems

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