“…In general, the film polishing rate is principally determined by the chemical properties (i.e., hydrolysis reaction degree and the contact angle of the CMP slurry on the polished Si wafer surface) as well as the mechanical properties (i.e., electrostatic force between the colloidal silica abrasives and the polished Si wafer surface). Note that the film polishing rate is governed by Preston’ Equation (i.e., ); in particular, the electrostatic force strongly affects a constant ( ), where , , , , and are time, film topography height, the material constant, CMP head pressure, and relative table velocity, respectively [ 55 , 56 , 57 , 58 ]. Thus, the relative electrostatic force between the colloidal silica abrasives and the polished Si wafer surface during CMP was calculated as a function of the concentration of the hydrolysis reaction accelerator.…”