Self-Sensing Method Considering the Dynamic Impedance of Piezoelectric Based Actuators for Ultralow Frequency

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

“…This geometry change alters the PEA's electrical properties. Therefore, an equivalent electrical model that does not account for the variations of C pea due to v c would not accurately depict the electrical characteristics of piezoelectric materials [36].…”

“…Mingjie et al [42] combined the behavior of the parallel model at low frequency and that of the series model at high frequency and showed that this representation well fitted with experimental tests. Bafumba et al [36] captured the influence of the control voltage v c (amplitude and frequency) on PEAs with an impedance map (see figure 5). Mansour et al [43] has highlighted the effect of an external force on the PEA's impedance.…”

“…Even though charge-based SSA has demonstrated a great potential [36], [38], [44], [45], its effectiveness depends on the morphology of the PEA and the choice of the mechanical properties of its constituent materials. Therefore, the first step to take full advantage of the potential of charge-based SSA is the PEA's design.…”

“…The advantage of numerical processing is that it allows the use of more complex electrical impedance models of PEAs. Bafumba et al [36] proposed a way to reduce errors in the estimation of the displacement at the tip of cantilever PEAs through their equivalent numerical impedance (see figure 9). The suggested equivalent numerical impedance considers the impact of the mechanical deformation of the piezoelectric element on its electrical impedance.…”

“…A. Piezoelectric Effect -Dynamic electrical properties SSA based on the piezoelectric direct effect demands a tedious continual tuning in order to discriminate the signal that is related to the PEA's strain from the dielectric signal, the noisy environmental conductive materials or from outer metal parts such as electrical wires [22], [36]. As already mentioned, SSA based on the piezoelectric direct effect cannot provide a good estimate of the PEA's displacement if its initial state is unknown.…”