Abstract:Parallel plate actuators (PPAs) are widely used in micro-electro-mechanical systems. Control strategies for PPAs often require displacement and velocity feedback that may be measured with various sensing techniques, which may require additional structures or distort the steady-state behaviour. An alternative approach of designing an estimator using the measured voltage across the PPA without additional sensing structures and distortions is proposed in this work. This novel method can improve the performance an… Show more
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