2014
DOI: 10.1541/ieejjia.3.455
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Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage

Abstract: High-precision stages are industrial equipment used in micro-fabrications. Fast and precise positioning control is a very important technology for improving the throughput and the product quality. In particular, a large-scale stage has a low resonance mode which disturbs fast and precise positioning because of the structures of the stage. In this paper, a novel feedback system is proposed in a SIMO system using multiple position sensors which are located at an actuator side and a load side. The proposed feedba… Show more

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Cited by 33 publications
(6 citation statements)
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“…The head-positioning control system is one of the most widely used sampled-data positioning control systems all over the world and essential to infrastructure for our advanced information society. Moreover, the control system and characteristics of the controlled object in the head-positioning control systems are similar to other precise positioning systems such as a galvano scanner, or a linear X-Y stage (Seki and Iwasaki, 2014;Sakata et al, 2014). Therefore, to show the validity of the proposed method, we employ the head-positioning system of HDDs as a textbook example (Franklin et al, 1998).…”
Section: Example: the Head-positioning System Of Hddsmentioning
confidence: 99%
See 1 more Smart Citation
“…The head-positioning control system is one of the most widely used sampled-data positioning control systems all over the world and essential to infrastructure for our advanced information society. Moreover, the control system and characteristics of the controlled object in the head-positioning control systems are similar to other precise positioning systems such as a galvano scanner, or a linear X-Y stage (Seki and Iwasaki, 2014;Sakata et al, 2014). Therefore, to show the validity of the proposed method, we employ the head-positioning system of HDDs as a textbook example (Franklin et al, 1998).…”
Section: Example: the Head-positioning System Of Hddsmentioning
confidence: 99%
“…The wide availability of inexpensive microprocessors has made sampled-data control systems very popular for positioning control in mechatronic products (Hirata et al, 1999;Hirata and Tomizuka, 2005;Ishikawa, 2008;Fujimoto, 2013;Seki and Iwasaki, 2014;Sakata et al, 2014;Ohnishi et al, 2016;. As a result, a sampled-data control system should be assumed to be the standard control system for mechatronic products.…”
Section: Introductionmentioning
confidence: 99%
“…Seki and Iwasaki proposed a vibration suppression control method by self‐sensing actuation , Sakata et al . examined self‐resonance cancelation for a two‐mass system , and Kondo et al . investigated a slip‐stick vibration suppression control for traction drive trains given the contact condition between wheels and rails .…”
Section: Motion Controlmentioning
confidence: 99%
“…In this paper, we clarify that the characteristic of relative positioning system constructed with flexible arm is similar to that of two-mass system. Therefore, we propose a new control system that combines the proposed observer and the self resonance cancellation (SRC) technique (Sakata, et al, 2014) in order to improve control performance of relative positioning system. The results of numerical simulation and experiments show that the proposed control system improves the relative positioning performance.…”
Section: Introductionmentioning
confidence: 99%