Self-organization of quasi-equilibrium steady-state condensation in accumulative ion-plasma devices

Abstract

We consider both theoretically and experimentally self-organization process of quasi-equilibrium steadystate condensation of sputtered substance in accumulative ion-plasma devices. It has been shown that the self-organization effect is caused by self-consistent variations of the condensate temperature and the supersaturation of depositing atoms. Two possible types of self-organization process have been found out on the basis of the phase-plane method. The aluminium condensation experimental data confirming the self-organization nature of quasi-equilibrium steady-state condensation are discussed.

Formation of copper porous structures under near-equilibrium chemical vapor deposition

“…Our previous works [37][38][39][40] have shown that, self-assembling of ordered nanoparticles system or nanoporous structures can be implemented under near-equilibrium condensation conditions in the plasma-condensate system. It has been established, that the nucleation occurs only on the limited amount of active centers.…”

“…In this case, the free energy minimization together with Ostwald ripening determine the monodispersity of the nanoparticles shape and size on the nucleation stage [41][42][43][44]. The more prolonged condensation results in the porous structures growth which is caused by an incomplete intergrowth of newly formed nanoparticles [45,[37][38][39].…”

“…In this case, the reevaporation is enhanced not only by plasma heating, but also by direct energy transfer from the plasma particles to adatoms. In our previous works [38,45], this energy exchange was taken into account by the decrease in the desorption energy up to the effective value. It is known that, the equilibrium pressure value P 0 is determined by equation [48]:…”

“…In this context, a question arises how the chemically active medium influences the system approaching to the equilibrium. In [38] we have suggested that weakly bounded to the growth surface adatoms may react with other chemical elements and return to vapor state. For example, the adsorbed carbon atoms can be bonded with hydrogen and transform into more volatile hydrocarbon fraction which vaporizes at relatively low temperatures.…”

Formation of porous zinc nanostructures during self-organization of critically small steady-state supersaturations

“…The above‐described non‐linear interdependence of the deposition parameters stabilizes the supersaturation value at a constant level. The mathematical model of self‐organization of small steady‐state supersaturations in APCS is described in detail in .…”