Superlattices and Microstructures volume 44, issue 4-5, P705-713 2008 DOI: 10.1016/j.spmi.2008.07.003 View full text
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S. Kalem

Abstract: Single crystal Silicon is self-organized into Ammonium Silicon Hexafluoride ((NH 4 ) 2 SiF 6 ) based complex structures under exposure to vapors of an HF-rich HF:HNO 3 mixture. Exposure with relatively high [HF]/[H 2 O] and [HNO 3 ]/[H 2 O] ratios, corresponding to high growth rates or relatively high vapor pressures, favors the self-organization of straight columnar structure like pillars or micro and nanotrees perpendicular to the wafer plane, while low chemical ratios lead to the formation of a layer with…

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