Self-magnetic drive of a shunting arc

Takaki, Koichi; Hasegawa, R.; Nakamura, S. N.; Mukaigawa, Seiji; Fujiwara, Tamiya; Kumagai, Masao; Yukimura, Ken

doi:10.1016/j.surfcoat.2004.04.042

Cited by 18 publications

(3 citation statements)

References 9 publications

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“…The shunting arc discharge plasma generated around the carbon rod spreads toward the muzzle of the plasma source at a velocity of about 1 km/s. 28) The plasma is estimated to spread out from the muzzle about 25 ms after the arc ignition and reaches the target electrode about 100 ms after the arc ignition. The current waveforms in Fig.…”

Section: Resultsmentioning

confidence: 99%

Production of Titanium-Containing Carbon Plasma Using Shunting Arc Discharge for Hybrid Film Deposition

Takaki¹,

Murakami²,

Mukaigawa³

et al. 2010

Jpn. J. Appl. Phys.

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A carbon-shunting arc discharge was generated with a titanium cathode for titanium-containing carbon plasma production to deposit carbon-based hybrid films. A carbon rod of 2 mm diameter and 40 mm length was employed for generation of the carbon shunting arc discharge. A silicon substrate was immersed into the plasma, and a series of negative pulse voltages were applied to the substrate holder synchronized with shunting arc discharge ignition. The cathode side rod holder material was changed from carbon to titanium to supply holder material particles into the carbon shunting arc plasma. The shunting arc plasma was successfully produced for both rod holder materials. Heating energy to generate the shunting arc was reduced using titanium as the cathode side holder material. A spectroscopic measurement from plasma light emission showed that the produced plasma contained titanium ions at employing titanium as the cathode material. The ions contained in the produced plasma were extracted with -2.0 kV negative pulse voltage. The ion current at the titanium cathode was larger value than that of the carbon cathode. X-ray photoelectron spectroscopy showed that the prepared carbon films contained titanium and showed a Ti/C ratio of 0.099 at 1200 V charging voltage of a 200 µF capacitor.

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Section: Resultsmentioning

confidence: 99%

Production of Titanium-Containing Carbon Plasma Using Shunting Arc Discharge for Hybrid Film Deposition

Takaki¹,

Murakami²,

Mukaigawa³

et al. 2010

Jpn. J. Appl. Phys.

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“…5 A rail-type shunting arc gun has also been developed as a carbon plasma source. 6 This trigger-less discharge can simplify the control of the plasma discharge.…”

Section: A Various Types Of Plasma Gunmentioning

confidence: 99%

Shunting arc plasma source for pure carbon ion beam

Koguchi

Sakakita

Kiyama

et al. 2012

Review of Scientific Instruments

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A plasma source is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA∕mm(2) at the peak of the pulse.

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“…A magnetically driven shunting arc which drives plasma in one direction has been developed, and high-speed film formation about 100 times faster than the omnidirectional type used in film formation has been achieved [12,13]. This is thought to link high-speed film formation to vaporizing the anode and cathode side of the driving walls along with driving the plasma using a carbon material for the driving side walls and not just for driving the plasma in one direction, and to providing a new carbon material.…”

Section: Introductionmentioning

confidence: 99%

Ion extraction from magnetically driven shunting‐arc plasma and density estimation at sheath boundary

Kumagai

Mukaigawa

Takaki

et al. 2007

Electrical Engineering Japan

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Ion extraction from a magnetically driven shunting arc plasma and the plasma density at the sheath boundary are described in this paper. The plasma density is obtained using current and voltage waveforms for a target which is immersed in the plasma to extract the carbon ions. A 40‐mm‐long carbon rod which is 2 mm in diameter is employed as a solid‐state plasma source. A large current of more than 1 kA is supplied from a charged‐up 20‐µF capacitor to heat the carbon rod and to vaporize the rod materials. The shunting arc plasma generated along the rod surface is driven by the Lorenz force and is accelerated toward the muzzle of a plasma launcher which consists of a pair of 100‐mm‐long carbon plates. A 64‐mm‐diameter brass disk is placed 100 mm away from the carbon rod and is used as the target. A 10‐µs‐wide negative pulse bias voltage is applied to the target for the extraction of the carbon ions from the shunting arc plasma. The ion density near the sheath boundary around the target is obtained using two procedures: utilization of the stationary target current to determine the ion current and/or utilization of the target bias voltage waveforms. The ion density is obtained as 1.1×1015m−3 at µs after the arc ignition using the target current. The density is larger than the density of 5.1×1014m−3 obtained using the waveform of the target voltage. The plasma density is also predicted using a Bohm equation and a momentum conservation equation. The plasma density is 1.6×1015m−3 at 100 µs after the arc ignition. The density decreases as the time from arc ignition increases. © 2007 Wiley Periodicals, Inc. Electr Eng Jpn, 162(2): 1– 9, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/eej.20553

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Self-magnetic drive of a shunting arc

Cited by 18 publications

References 9 publications

Production of Titanium-Containing Carbon Plasma Using Shunting Arc Discharge for Hybrid Film Deposition

Production of Titanium-Containing Carbon Plasma Using Shunting Arc Discharge for Hybrid Film Deposition

Shunting arc plasma source for pure carbon ion beam

Ion extraction from magnetically driven shunting‐arc plasma and density estimation at sheath boundary

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