2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
DOI: 10.1109/omems.2003.1233509
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Self-hold, precisely controllable and low power consumption optical cross-connect switch using ultrasonic micro motors

Fumikazu Oohira
1
,
M. Iwase
2
,
K. Watanabe
3
et al.
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