2005
DOI: 10.1007/s00339-005-3219-z
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Self-formation of GaN hollow nanocolumns by inductively coupled plasma etching

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Cited by 27 publications
(10 citation statements)
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“…With recent advances in crystal growth technology, GaN nanostructures have been synthesized through different methods. [18][19][20][21][22] Although most GaN nanowires crystallize in the stable WZ structures, an embedded ZB phase in the WZ nanowires have been observed. [23][24][25] Recently, the WZ/ZB heterojunctions have been synthesized.…”
Section: Introductionmentioning
confidence: 98%
“…With recent advances in crystal growth technology, GaN nanostructures have been synthesized through different methods. [18][19][20][21][22] Although most GaN nanowires crystallize in the stable WZ structures, an embedded ZB phase in the WZ nanowires have been observed. [23][24][25] Recently, the WZ/ZB heterojunctions have been synthesized.…”
Section: Introductionmentioning
confidence: 98%
“…The detailed observation of atomic configuration shows that new bond is formed between the individual nanotubes in the bundles due to the The interaction of individual nanotube in the bundles are also responsible for the brittle properties of bundle that consisted of seven individual nanotube at 1500 K. The study of the individual nanotube demonstrates that the BDT increase when the wall thickness of nanotube is increased, which can be attributed to the large surface to volume ratio of the nanotube. 7 As the bonding of surface atoms is weaker than that of core atoms, it will be much easier for surface atoms to leave its crystal lattice position. And plastic deformation occurs much easier in nanotubes with thin wall thickness at lower temperatures.…”
Section: Resultsmentioning
confidence: 99%
“…According to the literature reporting, wurtzite GaN nanotubes with hexagonal cross-section and growing along the [001] crystalline direction can be synthesized though several synthesis methods, such as chemical thermal evaporation process, 4 conversion of amorphous gallium oxide nanotubes, 5 an "epitaxial casting" approach, 6 and inductively coupled plasma etching method. 7 The side surface GaN nanotubes can be with atomic arrangement along (100) or (110) crystal planes; however, as the surface energy of (100) planes is lower than that of (110) planes, so the GaN nanotubes with side surfaces of (100) planes are easily synthesized than the one with (110) planes. 4 Our previous simulation results show that the tensile behavior of individual GaN nanotubes depends on the temperatures, i.e., GaN nanotubes fracture with ductility and brittleness manner at higher temperatures and lower temperatures, respectively, which leads to a brittle to ductile transition (BDT).…”
Section: Introductionmentioning
confidence: 99%
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“…During etching, we kept the ICP power, bias power, chamber pressure and BCl 3 flow rate at 200 W, 200 W, 20 mTorr and 5 sccm, respectively. Details of the growth can be found elsewhere [23]. Note that all the specimens were etched with the same time period.…”
Section: Methodsmentioning
confidence: 99%