2016
DOI: 10.1103/physrevlett.116.025901
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Self-Diffusion in Amorphous Silicon

Abstract: The present Letter reports on self-diffusion in amorphous silicon. Experiments were done on ^{29}Si/^{nat}Si heterostructures using neutron reflectometry and secondary ion mass spectrometry. The diffusivities follow the Arrhenius law in the temperature range between 550 and 700 °C with an activation energy of (4.4±0.3)  eV. In comparison with single crystalline silicon the diffusivities are tremendously higher by 5 orders of magnitude at about 700 °C, which can be interpreted as the consequence of a high diffu… Show more

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Cited by 26 publications
(39 citation statements)
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References 56 publications
(69 reference statements)
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“…Also prolonged annealing of a sample up to 109 h at 500 C does not lead to a further significant intensity decrease. Annealing at temperatures of 550 C and above, where long range diffusion is present, 25,26 clearly shows that a further reduction of the Bragg peak to values lower than 70% of the initial value can be observed. This demonstrates that diffusion is frozen-in for long annealing times at the given temperature and atomic motion is restricted to short annealing times and consequently to short range distances of 1 to 3 nm (as will be shown later).…”
Section: Resultsmentioning
confidence: 97%
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“…Also prolonged annealing of a sample up to 109 h at 500 C does not lead to a further significant intensity decrease. Annealing at temperatures of 550 C and above, where long range diffusion is present, 25,26 clearly shows that a further reduction of the Bragg peak to values lower than 70% of the initial value can be observed. This demonstrates that diffusion is frozen-in for long annealing times at the given temperature and atomic motion is restricted to short annealing times and consequently to short range distances of 1 to 3 nm (as will be shown later).…”
Section: Resultsmentioning
confidence: 97%
“…25 All samples discussed in this study are X-ray amorphous as proven by grazing incidence diffractometry (GI-XRD), using a Bruker D 5000 machine. 25,26 The isotope modulation of the samples in the direction perpendicular to the surface was verified by Secondary Ion Mass Spectrometry (SIMS). Due to the difference in neutron scattering lengths of 29 Si (4.70 fm) and nat Si (4.15 fm) this system is well-suited for neutron scattering.…”
Section: Methodsmentioning
confidence: 99%
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“…Our study employs a unique oxygen-isotope ZnO heterostructures with delicately-controlled chemical potential () and Fermi level (EF). Unlike the gaseous-exchange technique, which has absorption and evaporation problems 23,24 , the self-diffusion in the isotope heterostructures provides reliable information on the energetics and electronic properties of point defects [25][26][27] . We A show unambiguously that the diffusion process of oxygen atoms in ZnO is predominantly mediated by VO rather than oxygen interstitial (Oi).…”
mentioning
confidence: 99%