1998
DOI: 10.1088/0022-3727/31/17/013
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Self-consistent modelling of overdense plasmas in ECR discharges

Abstract: A two-dimensional self-consistent model of a large-volume ECR discharge is presented. The set-up of the plasma source is introduced briefly. The model treats electrons as a fluid assuming a Maxwellian velocity distribution and determines electron density and temperature from a particle and energy balance. Wave propagation in the plasma is calculated from a wave equation derived from Maxwell's equations in matter. The self-consistent coupling of the equations is achieved by determining the material properties o… Show more

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Cited by 10 publications
(11 citation statements)
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“…There are two possible reasons to be considered. First, the assumption of a Maxwellian EEDF might not apply because at least at very low pressures (0.02 Pa, 0.05 Pa) and high power (4800 W) results from Thomson scattering show the existence of overthermal electrons at energy states above 10 eV [12]. However, at the pressure of 0.5 Pa the characteristic time of thermalization (τ ee ∼ T 3/2 e /n e ) is considerably smaller than at low pressure due to larger electron density and lower temperature so that we expect possible deviations of the EEDF from a Maxwellian to be rather small.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…There are two possible reasons to be considered. First, the assumption of a Maxwellian EEDF might not apply because at least at very low pressures (0.02 Pa, 0.05 Pa) and high power (4800 W) results from Thomson scattering show the existence of overthermal electrons at energy states above 10 eV [12]. However, at the pressure of 0.5 Pa the characteristic time of thermalization (τ ee ∼ T 3/2 e /n e ) is considerably smaller than at low pressure due to larger electron density and lower temperature so that we expect possible deviations of the EEDF from a Maxwellian to be rather small.…”
Section: Resultsmentioning
confidence: 99%
“…A detailed description of the experimental set-up of the investigated ECR plasma source can be found in [10]. The cylindrical discharge vessel (length 1.6 m, diameter 180 mm) is immersed in a static magnetic mirror field.…”
Section: Experimental Set-upmentioning
confidence: 99%
“…Two 0.2 µm aluminum foils located at the entrance aperture of the spectrometer block the intense visible radiation. The transmitted XUV emission [26] is imaged by a nickel-coated toroidal mirror onto the CCD camera. A transmission grating consisting of freestanding gold bars with 1000 lines mm −1 is used to disperse the XUV radiation.…”
Section: Methodsmentioning
confidence: 99%
“…At the opposite end to the VINETA device the ECR heating setup is installed. Microwaves were previously used on linear magnetized devices as plasma sources [11,12,13,14]. The goal is a direct coupling of the microwave electric field to the electron gyro motion which allows resonant energy transfer to the plasma electrons.…”
Section: Experimental Setup and Diagnosticmentioning
confidence: 99%