Self-calibration performance analysis of sheet micro-components based on droplet array

Abstract

The droplet array-based micro-component self-calibration method features simple operation, easy batch control implementation, and holds great promise in the field of micro-assembly. The paper investigates the self-calibration process, analyzes the factors influencing self-calibration performance, discusses self-calibration errors, self-calibration range, and their relationship with micro-component parameters, droplet array parameters, and fluid parameters, and proposes a construction method suitable for droplet arrays suitable for micro-components. The research results indicate that the self-calibration error and calibration range of micro-components are related to micro-component parameters, substrate array parameters, and droplet parameters. When the micro-component size is greater than or equal to the droplet array size, the self-calibration error is relatively small. Constructing an appropriate droplet array based on the size and shape of the micro-components can reduce self-calibration errors and meet the self-calibration accuracy requirements for micro-components of varying sizes and shapes.