Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer
Abstract:A new method based on the interferometric pseudo-lateral-shearing method is proposed to evaluate the pitch variation of a large-scale planar variable-line-spacing (VLS) grating. In the method, wavefronts of the first-order diffracted beams from a planar VLS grating are measured by a commercial Fizeau form interferometer. By utilizing the differential wavefront of the first-order diffracted beam before and after the small lateral shift of the VLS grating, the pitch variation of the VLS grating can be evaluated.… Show more
“…In the fourth paper, by Xiong et al [ 4 ], the authors propose a new method based on the interferometric pseudo-lateral-shearing method to evaluate the pitch variation of a large-scale planar variable-line-spacing (VLS) grating. In the method, wavefronts of the first-order diffracted beams from a planar VLS grating are measured using a commercial Fizeau form interferometer.…”
“…In the fourth paper, by Xiong et al [ 4 ], the authors propose a new method based on the interferometric pseudo-lateral-shearing method to evaluate the pitch variation of a large-scale planar variable-line-spacing (VLS) grating. In the method, wavefronts of the first-order diffracted beams from a planar VLS grating are measured using a commercial Fizeau form interferometer.…”
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