2005
DOI: 10.1109/tadvp.2005.858454
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Self-assembly for microscale and nanoscale packaging: steps toward self-packaging

Abstract: The packaging of microelectromechanical systems (MEMS) and nanoscale devices constitutes an important area of research and development that is vital to the commercialization of such devices. Packaging needs of these devices include interfaces to nonelectronic domains; integration of structures, devices, and subsystems made with incompatible fabrication processes into a single platform; and the ability to handle a very large numbers of parts. Although serial, robotic assembly methods such as pick-and-place have… Show more

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Cited by 108 publications
(90 citation statements)
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“…Although robotic assembly can manipulate individual atoms (51), the assembly speed drops steadily from tens of thousands of parts per hour for millimeter-scale parts to one atom per hour (80). Self-assembly, in contrast, is a highly parallel and therefore fast process; however, diffusion slows with increasing part size, and the increasing mismatch between interaction energies and thermal energies limits the accuracy of the assembly process.…”
Section: Nanoscale Assemblymentioning
confidence: 99%
“…Although robotic assembly can manipulate individual atoms (51), the assembly speed drops steadily from tens of thousands of parts per hour for millimeter-scale parts to one atom per hour (80). Self-assembly, in contrast, is a highly parallel and therefore fast process; however, diffusion slows with increasing part size, and the increasing mismatch between interaction energies and thermal energies limits the accuracy of the assembly process.…”
Section: Nanoscale Assemblymentioning
confidence: 99%
“…Traditional assemblies such as microactuators, microsensors, microcontrollers, and pick-and-place techniques [66,67] are inappropriate for mass production with large numbers of micro parts because of the speed and cost constraints resulted from the serial manipulation and the "sticking problem". Efficient microassembly methods must be parallel approaches to integrate a large number of components in hybrid systems.…”
Section: Semiconductor Electronic Packagingmentioning
confidence: 99%
“…Self-assembly has been studied as a way to enable these advantages through the handling, packaging, and integration of parts to create two or three dimensional structures in a highly parallel and scalable manner [1]. Self-assembly is particularly applicable for parts or components having length scales below 0.5 mm [2], because the number of parts needed to create useful structures or systems may be very large, and conventional pick and place or other serial assembly methods become infeasible. In addition, manual or robotic pick and place methods become increasingly difficult as surface forces become dominant at shorter length scales.…”
Section: Open Accessmentioning
confidence: 99%
“…(1) When this B field arises from another identical magnetic dipole situated at a distance r, the dipole approximation predicts proportionality between force and the permeability of free space µ 0 , m 2 ,…”
mentioning
confidence: 99%