2005
DOI: 10.1002/smll.200500024
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Self‐Assembly and Crystallization Behavior of Mesoporous, Crystalline HfO2 Thin Films: A Model System for the Generation of Mesostructured Transition‐Metal Oxides

Abstract: Mesoporous thin films of crystalline hafnium oxide were fabricated by evaporation-induced self-assembly in combination with sol-gel processing, followed by a suitable post heat-treatment procedure to initiate the crystallization. A novel type of block-copolymer template was used as structure-directing agent, which generated a distorted cubic arrangement of spherical mesopores, the size of which could be quantified by suitable techniques, such as ellipsometry-porosimetry, small-angle X-ray scattering, and atomi… Show more

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Cited by 72 publications
(64 citation statements)
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“…The crystallization of TiO 2 /KLE films takes place at 500°C, i.e., after the complete dehydration of the framework, [12,23] and provides a pure-phase (anatase), highly crystalline material without any X-ray-detectable traces of rutile or brookite ( Fig. 3a), in good agreement with electron diffraction data.…”
Section: Characterization Of the Mesostructure And Crystallinity Of Tsupporting
confidence: 71%
“…The crystallization of TiO 2 /KLE films takes place at 500°C, i.e., after the complete dehydration of the framework, [12,23] and provides a pure-phase (anatase), highly crystalline material without any X-ray-detectable traces of rutile or brookite ( Fig. 3a), in good agreement with electron diffraction data.…”
Section: Characterization Of the Mesostructure And Crystallinity Of Tsupporting
confidence: 71%
“…8 nm. [14,17,18] XRD experiments revealed that the crystallographic orientation of the nanocrystals was maintained even in the presence of mesopores, and the degree of preferred orientation only slightly decreased in comparison to the nonporous films prepared with low amounts of surfactant. Such mesoporous metal oxides with the nanocrystals being highly oriented with respect to the substrate have not been reported to date.…”
mentioning
confidence: 88%
“…An important prerequisite for the formation of a stable mesoporous ordered network is the complete solidification/condensation of the inorganic framework. [14] A separate condensation step at 100-300°C, performed at a very slow heating rate, is therefore indispensable to ensure the stability of the mesoscopic structure throughout crystallization. The evolution of the mesostructure was monitored by temperature-dependent 2D small-angle X-ray scattering (2D-SAXS) measurements.…”
mentioning
confidence: 99%
“…[13] Using these block copolymers in the EISA process and subsequent annealing provides various crystalline metal oxides with well-defined mesopore architectures. [13,14] Based on the EISA conceptual methodology in combination with KLE polymers as texture directors, we have developed an EISA procedure for the preparation of crystalline and transparent ITO layers with well-ordered, accessible mesoporosity and good electric conductivity. These layers were then used as hosts to incorporate and anchor guest molecules (dyes and ferrocene species) and as transparent electrodes at the same time.…”
mentioning
confidence: 99%