2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) 2020
DOI: 10.1109/i2mtc43012.2020.9128499
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Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront Measurements of High-NA Optics

Martin Fuerst
1
,
Nikolaus Berlakovich
2
,
Ernst Csencsics
3
et al.
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Cited by 2 publications
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