2002
DOI: 10.1088/0960-1317/12/4/313
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Self-aligning gas/liquid micropump

Abstract: In this paper a piezoelectrically driven silicon membrane pump with passive dynamic valves is described. It is designed to pump gases and liquids and to be tolerant to gas bubbles. Reducing the dead volume within the pump, and thus increasing the compression ratio, one achieves the gas pumping. The main advantages and novel features of the pump described in the paper are the self-aligning of the membrane unit to the valve unit and the possibility of using screen-printed PZT as actuator, which enables mass prod… Show more

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Cited by 91 publications
(48 citation statements)
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“…In the past, fluidic control included syringe pumps (11), hydrogel valves (12), gravity-driven pumps (13), evaporation-based pumps (14,15), acoustic pumps (16), gas-generationbased pumps (17,18), and centrifugal force in CD chips (19). Electrokinetic flow (20)(21)(22), thermopneumatic (23,24), pneumatic͞hydraulic (25), or mechanical (26,27) valves and pumps have a high degree of control, but require external connection lines to larger equipment for actuation. A few fully integrated and self-packaged systems (23,28) have been developed, but lack the reconfigurability inherent with numerous active valves and pumps.…”
mentioning
confidence: 99%
“…In the past, fluidic control included syringe pumps (11), hydrogel valves (12), gravity-driven pumps (13), evaporation-based pumps (14,15), acoustic pumps (16), gas-generationbased pumps (17,18), and centrifugal force in CD chips (19). Electrokinetic flow (20)(21)(22), thermopneumatic (23,24), pneumatic͞hydraulic (25), or mechanical (26,27) valves and pumps have a high degree of control, but require external connection lines to larger equipment for actuation. A few fully integrated and self-packaged systems (23,28) have been developed, but lack the reconfigurability inherent with numerous active valves and pumps.…”
mentioning
confidence: 99%
“…In 2002, Schabmueller, et al [22], from Britain developed a parallel-like valveless piezoelectric micro-pump with cone-shaped tubes, which shared the same pump chamber (see Fig. 30).…”
Section: Parallel Structurementioning
confidence: 99%
“…30 are synchronously driven in a parallel structure [22]. They share a same pump chamber and a same driving source.…”
Section: Brief Summarymentioning
confidence: 99%
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“…The assembled clamp is then placed within an oven at 80 8C for approximately 60 h, after which time the MMA has polymerized and cross-linked to the layers above and below it, resulting in an optically transparent bond between the layers. Relatively complex multi-layered fluidic circuits can be fabricated in this way, in much the same way that fluidic devices can be fabricated in silicon through both etch-fabrication with the use of patterned sacrificial masking layers, or direct laser surface micromachining followed by assembly using wafer bonding techniques such as anodic bonding [4,5].…”
Section: Assembly Of Multi-path Headermentioning
confidence: 99%