1999
DOI: 10.1109/84.749403
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Self-aligned positioning of microoptical components by precision prismatic grooves impressed into metals

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Cited by 4 publications
(2 citation statements)
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“…They can also be used to emboss metallic materials (e.g., Al and Cu) in addition to polymers. 110 For very simple features, like micron-sized channels on the surface of polymer sheets for measuring the electroosmotic mobility, metal wires used in the EDM process can serve as a mold in a wire-imprinting technique. 90 In many biomedical devices, the microscale and nanoscale features often are very small, have complicated patterns, or require a high-aspect ratio.…”
Section: Hot Embossing Lithographymentioning
confidence: 99%
“…They can also be used to emboss metallic materials (e.g., Al and Cu) in addition to polymers. 110 For very simple features, like micron-sized channels on the surface of polymer sheets for measuring the electroosmotic mobility, metal wires used in the EDM process can serve as a mold in a wire-imprinting technique. 90 In many biomedical devices, the microscale and nanoscale features often are very small, have complicated patterns, or require a high-aspect ratio.…”
Section: Hot Embossing Lithographymentioning
confidence: 99%
“…They can also be used to emboss metallic materials (e.g. Al and Cu) in addition to polymers [82]. For very simple features, like micron-sized channels on the surface of polymer sheets for measuring the electroosmotic mobility, metal wires used in the EDM process can serve as a mold in a wire-imprinting technique [83].…”
Section: Hot Embossing Lithographymentioning
confidence: 99%