2019
DOI: 10.1007/s13204-019-01050-0
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Self-aligned molding technology (SAMT) for fabrication of 3D structures with a foldable imprint mold

Abstract: We propose self-aligned molding technology (SAMT) as a novel nanoimprint technique with a self-aligned foldable imprint mold to control size and shape of structures and particles for a broad range of materials. SAMT is a single-step molding process for complex 3D shaped structures and particles using a reusable double-sided mold with a hinge. We present the fabrication process of SAMT molds, including electron beam lithography on a sloped surface, angular dry etching, and a template-based double inversion tech… Show more

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Cited by 1 publication
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“…Wireless sensor network technology integrates network technology, 7 signal processing technology, 8 application technology, 9 modern network technology, wireless communication technology, 10,11 and so forth and has a good application prospect in environmental monitoring, military, remote sensing information, and other fields. [12][13][14] In order to perceive and disseminate information in a variety of complex environments, researchers proposed wireless sensor networks applied to a variety of different applications.…”
Section: Introductionmentioning
confidence: 99%
“…Wireless sensor network technology integrates network technology, 7 signal processing technology, 8 application technology, 9 modern network technology, wireless communication technology, 10,11 and so forth and has a good application prospect in environmental monitoring, military, remote sensing information, and other fields. [12][13][14] In order to perceive and disseminate information in a variety of complex environments, researchers proposed wireless sensor networks applied to a variety of different applications.…”
Section: Introductionmentioning
confidence: 99%