2021
DOI: 10.1063/5.0036520
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Self-aligned gates for scalable silicon quantum computing

Abstract: Silicon quantum dot spin qubits have great potential for application in large-scale quantum circuits as they share many similarities with conventional transistors that represent the prototypical example for scalable electronic platforms. However, for quantum dot formation and control, additional gates are required, which add to device complexity and, thus, hinder upscaling. Here, we meet this challenge by demonstrating the scalable integration of a multilayer gate stack in silicon quantum dot devices using sel… Show more

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Cited by 41 publications
(46 citation statements)
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“…In Fig. 2b), we also compare the hyperfine noise in DRA FinFETs and in state-of-the-art devices [10,35,36], where the fins are grown along the standard axes (SA) z [110] and y [100]. In this case, we estimate T SA 0 ≈ 0.2 − 0.6 µs depending on the direction of B, in reasonable agreement with experiments [10].…”
supporting
confidence: 77%
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“…In Fig. 2b), we also compare the hyperfine noise in DRA FinFETs and in state-of-the-art devices [10,35,36], where the fins are grown along the standard axes (SA) z [110] and y [100]. In this case, we estimate T SA 0 ≈ 0.2 − 0.6 µs depending on the direction of B, in reasonable agreement with experiments [10].…”
supporting
confidence: 77%
“…Strikingly, this issue is resolved in Si DRA FinFETs with triangular cross-section [10,[35][36][37], where the hyperfine sweet spots appear when B ⊥ x. In fact, as shown in Fig.…”
mentioning
confidence: 98%
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“…The g tensor is the key parameter for studying the coupling of a spin-orbit state to a magnetic field [26][27][28][29][30][31][32][33]. However, most studies of the g tensor of hole quantum dots have been performed using devices that confine an unknown number of holes [34][35][36][37][38][39][40][41]. This has hindered the ability to understand hole-spin-qubit devices, since the number of holes is a primary factor influencing the orbital physics of the quantum dot [42].…”
Section: Introductionmentioning
confidence: 99%